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首页> 外文期刊>Microelectromechanical Systems, Journal of >Tungsten-Microhotplate-Array-Based Pirani Vacuum Sensor System With On-Chip Digital Front-End Processor
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Tungsten-Microhotplate-Array-Based Pirani Vacuum Sensor System With On-Chip Digital Front-End Processor

机译：基于钨-微孔板阵列的Pirani真空传感器系统，带有片上数字前端处理器

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An integrated CMOS-compatible Pirani vacuum sensor system has been developed in this paper, which consists of a tungsten microhotplate array with four same microhotplates in series, a constant current circuit, an 8-b A/D converter, and a digital interface. With a tiny amount of the external components, a gas pressure between $10^{-1}$ and $10^{5} hbox{Pa}$ can be sampled, digitized, and real-time displayed by a LED. It can also be transferred to an external process unit, which makes it suitable for application in a gas pressure control system. The sensor system is implemented in a 0.5-$muhbox{m}$ CMOS process. When the sensor system works at 5-V voltage and 2.5-MHz clock input, the total power consumption is 350 mW, and the temperature increase of each microhotplate is 35 $^{circ}hbox{C}$ .$hfill$[2010-0248]
机译：本文开发了集成的兼容CMOS的Pirani真空传感器系统，该系统由一个钨微孔板阵列和四个相同的微孔板串联而成，一个恒流电路，一个8-b A / D转换器和一个数字接口。借助极少量的外部组件，可以对介于$ 10 ^ {-1} $和$ 10 ^ {5} hbox {Pa} $之间的气压进行采样，数字化并通过LED实时显示。它也可以传送到外部处理单元，这使其适用于气压控制系统。传感器系统以0.5-muhbox {m} $ CMOS工艺实现。当传感器系统在5V电压和2.5MHz时钟输入下工作时，总功耗为350 mW，每个微热板的温度升高为35 $ ^ {circ} hbox {C} $。$ hfill $ [2010 -0248]

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