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首页> 外文期刊>Journal of Microelectromechanical Systems >Improved All-Silicon Microcantilever Heaters With Integrated Piezoresistive Sensing
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Improved All-Silicon Microcantilever Heaters With Integrated Piezoresistive Sensing

机译：改进的全硅微悬臂加热器，具有集成的压阻传感

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This paper presents the design, fabrication, and characterization of improved all-silicon microcantilever heaters with integrated piezoresistive sensing. The fabricated microcantilever heaters with piezoresistors are made solely from single crystal silicon with selective doping. Detailed characterization was performed to test the devices'' electrical, thermal, and mechanical properties. The performance of and crosstalk between heater and piezoresistor elements were thoroughly tested. The resistive heater could reach temperatures of $> 600 ^{circ}hbox{C}$, and its temperature coefficient of electrical resistance was $(2.01 pm 0.04) times 10^{-3} Omega/Omega cdot ^{circ}hbox{C}$ . When biased at 2 V in a Wheatstone bridge, the deflection sensitivity of the piezoresistor was $(4.25 pm 0.05) times 10^{-4} hbox{V/V} cdot muhbox{m}$ and remarkably, the heater circuit had a measurable deflection sensitivity of $(7.9 pm 0.5) times 10^{-5} hbox{V/V} cdot muhbox{m}$. Both the piezoresistor and the resistive heater were interfaced with a commercial atomic force microscope system to measure their sensitivities during topography imaging. The sensitivity of the thermal reading was much greater than that of piezoresistive reading. Noise-limited resolution of thermal reading was better than $0.46 pm 0.03 hbox{nm}/sqrt{hbox{Hz}}$ and piezoresistive reading was better than $3.4 pm 0.4 hbox{nm}/sqrt{hbox{Hz}}$ . This is the first experimental comparison between thermal and piezoresistive topographic sensing, both of which can replace optical lever sensing. Four cantilevers in an array demonstrated parallel topographic sensing with both t-he heater and the piezoresistor. $hfill$[2007-0107]
机译：本文介绍了具有集成压阻感测功能的改进型全硅微悬臂梁加热器的设计，制造和特性。带有压敏电阻的微悬臂梁式加热器仅由具有选择性掺杂的单晶硅制成。进行了详细的表征，以测试设备的电，热和机械性能。加热器和压敏电阻元件之间的性能和串扰已得到彻底测试。电阻加热器的温度可达$> 600 ^ {circ} hbox {C} $ ，其电阻温度系数为$（2.01 pm 0.04）乘以10 ^ {-3} Omega / Omega cdot ^ {circ} hbox {C} $ 。在惠斯通电桥中以2 V偏置时，压敏电阻的偏转灵敏度为$（4.25 pm 0.05）乘以10 ^ {-4} hbox {V / V} cdot muhbox {m} $ 值得注意的是，加热器电路的偏转灵敏度为$（7.9 pm 0.5）乘以10 ^ {-5} hbox {V / V} cdot muhbox {m} $ 。压阻器和电阻加热器均与商用原子力显微镜系统连接，以测量其在地形成像过程中的灵敏度。热读数的灵敏度远大于压阻读数的灵敏度。热读数的噪声限制分辨率优于$ 0.46 pm 0.03 hbox {nm} / sqrt {hbox {Hz}} $ ，压阻读数优于$ 3.4 pm 0.4 hbox {nm} / sqrt { hbox {Hz}} $ 。这是热和压阻形貌传感之间的首次实验比较，两者均可替代光学杠杆传感。阵列中的四个悬臂展示了同时使用加热器和压敏电阻的平行地形感应。 $ hfill $ [2007-0107]

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