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首页> 外文期刊>Journal of Microelectromechanical Systems >Flexible Dome and Bump Shape Piezoelectric Tactile Sensors Using PVDF-TrFE Copolymer
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Flexible Dome and Bump Shape Piezoelectric Tactile Sensors Using PVDF-TrFE Copolymer

机译：使用PVDF-TrFE共聚物的柔性圆顶和凹凸形状压电触觉传感器

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In this paper, a new mold-transfer method to pattern piezoelectric polymer has been developed and applied to fabricate innovative dome and bump shape polyvinylidene-fluoride-trifluoroethylene (PVDF-TrFE) films. The dome and bump shape PVDF-TrFE films have been successfully fabricated and characterized as a sensing component for flexible tactile sensors. The tactile sensors developed using these polymer microstructures show a high sensitivity which can measure as small as 40 mN force for bump shape sensors and 25 mN for dome shape sensors. The newly developed fabrication method provides a flexible way to pattern the piezoelectric polymer with different shapes and dimensions, including bump and dome shape piezoelectric polymer microstructures. In addition, a selective dc poling method for the PVDF-TrFE film has been developed for fabricating precisely located piezoelectric sensors with minimum crosstalk. The bump and dome shape PVDF-TrFE films developed in this paper can have numerous applications for microcatheters or other minimally invasive biomedical devices.$hfill$[2007-0142]
机译：在本文中，已经开发了一种用于模制压电聚合物的新型模具转移方法，并将其用于制造创新的圆顶和凸点形状的聚偏二氟乙烯-三氟乙烯（PVDF-TrFE）薄膜。圆顶和凸块形状的PVDF-TrFE薄膜已成功制造，并已表征为柔性触觉传感器的传感组件。使用这些聚合物微结构开发的触觉传感器显示出很高的灵敏度，对于隆起形状传感器，其测量力可低至40 mN，对于穹顶形状传感器，其测量力可低至25 mN。新开发的制造方法提供了一种灵活的方式来对具有不同形状和尺寸的压电聚合物进行构图，包括凸块和圆顶形状的压电聚合物微结构。此外，已开发出一种用于PVDF-TrFE膜的选择性直流极化方法，以制造具有最小串扰的精确定位的压电传感器。本文开发的凸块和穹顶形PVDF-TrFE膜可在微导管或其他微创生物医学设备中广泛应用。$ hfill $ [2007-0142]

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