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首页> 外文期刊>Journal of Microelectromechanical Systems >Automated Two-Axes Optical Fiber Alignment Using Grayscale Technology
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Automated Two-Axes Optical Fiber Alignment Using Grayscale Technology

机译：使用灰度技术的自动两轴光纤对准

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摘要

In this paper, we report a new method for actuating an optical fiber in two axes. This device enables in package active alignment of an optical fiber towards reducing the time and cost of optoelectronic packaging by eliminating the need for expensive and slow macroalignment machines. Opposing comb-drive actuators with integrated three-dimensional (3-D) wedges (fabricated using grayscale technology) create a dynamic v-groove to alter the horizontal and vertical alignment of an optical fiber cantilever. All structural components are fabricated in silicon using a single lithography and dry-etching step, making the system conducive to batch fabrication, an essential element to minimize the cost of including in-package alignment capabilities. Actuation of a cleaved fiber tip greater than 30 mum in each direction is demonstrated, with automated fiber alignment times on the order of 10s, comparable to those achieved using macroalignment systems. Alignment tolerances are held below 1.25 mum over a 20-by-20-mum actuation area for the first time. The influences of alignment target location, actuation parameters, and alignment algorithm on total alignment time are also presented
机译：在本文中，我们报告了一种驱动两轴光纤的新方法。通过消除对昂贵而缓慢的宏观对准机器的需求，该设备可以实现光纤的主动封装对准，从而减少光电子封装的时间和成本。带有集成的三维（3-D）楔形件（使用灰度技术制造）的对置梳齿驱动器产生了动态的V型槽，从而改变了光纤悬臂梁的水平和垂直方向。所有结构组件均使用一次光刻和干法蚀刻步骤在硅中制造，从而使该系统有利于批量制造，这是使包含封装内对准功能的成本降至最低的基本要素。演示了在每个方向上都开有大于30毫米的开裂光纤尖端的致动，其自动对准时间约为10s，这与使用宏观对准系统所实现的时间相当。对准公差首次在20 x 20微米的驱动区域内保持在1.25微米以下。还介绍了对准目标位置，致动参数和对准算法对总对准时间的影响

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