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首页> 外文期刊>Journal of Microelectromechanical Systems >Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging
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Asymmetric Dielectric Trilayer Cantilever Probe for Calorimetric High-Frequency Field Imaging

机译：非对称介电三层悬臂探针，用于量热高频场成像

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摘要

Multimaterial, microelectromechanical systems-based cantilever probes were developed for high-frequency magnetic field imaging. The basic configuration of the probe consists of a cantilever beam fabricated using surface micromachining and bulk micromachining techniques with dielectric silicon nitride and silicon oxide materials on a silicon wafer. A gold patterned metallization at the tip of the cantilever provides a source of eddy current heating due to the perpendicular component of the high-frequency magnetic field. This thermally absorbed power is converted to mechanical deflection by a multimaterial trilayer cantilever system. The deflection is measured with a beam-bounce optical technique employed in atomic force microscopy systems. We discuss the modeling, design, fabrication, and characterization of these field imaging probes
机译：开发了基于多材料，微机电系统的悬臂探针，用于高频磁场成像。探头的基本配置包括一个悬臂梁，该悬臂梁是使用表面微机械加工和体微机械加工技术制造的，在硅片上具有电介质氮化硅和氧化硅材料。由于高频磁场的垂直分量，在悬臂末端的金色图案化金属化提供了涡流加热的来源。这种热吸收的功率通过多层三层悬臂系统转换为机械偏转。用原子力显微镜系统中采用的光束反射光学技术测量挠度。我们讨论了这些野外成像探头的建模，设计，制造和表征

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