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首页> 外文期刊>Journal of Microelectromechanical Systems >In Situ Characterization of Induced Stiction in a MEMS
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In Situ Characterization of Induced Stiction in a MEMS

机译：MEMS中感应摩擦的原位表征

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Stiction remains a limiting factor in the performance and lifetime of MEMS devices. We have developed experimental tools for inducing and quantifying changes in stiction on a large array of MEMS actuators. Thousands of elements were subjected to aggressive wear in order to produce shearing forces that contributed to the degradation of contacting surfaces. Custom electronics were developed to accomplish nonstandard actuation of the MEMS array. Optical techniques were used to characterize the induction of and progression of stiction. A model incorporating experimental and geometrical values was used to determine stiction force as a function of actuation duration and packaging. For a depackaged array, an increase in stiction force of $sim$ 230 nN (per element) was induced through three days of high-speed actuation.1624
机译：静摩擦仍然是MEMS器件性能和寿命的限制因素。我们已经开发出实验工具，用于在大量MEMS执行器上感应和量化静摩擦的变化。成千上万的元件遭受了剧烈磨损，以产生剪切力，从而导致接触表面的退化。开发了定制电子设备以实现MEMS阵列的非标准驱动。光学技术被用来表征静坐感的诱导和发展。使用结合了实验值和几何值的模型来确定作为驱动持续时间和包装的函数的静摩擦力。对于拆包装的阵列，通过三天的高速驱动导致静力增加了sim $ 230 nN（每元件）.1624

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