...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of Microelectromechanical Systems >Fabrication of Integrated Vertical Mirror Surfaces and Transparent Window for Packaging MEMS Devices
【24h】

Fabrication of Integrated Vertical Mirror Surfaces and Transparent Window for Packaging MEMS Devices

机译：用于封装MEMS器件的集成垂直镜面和透明窗口的制造

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

A scheme for creating metal-coated vertical mirrors in silicon, along with an integrated transparent package lid for assembling, packaging, and testing microelectromechanical systems (MEMS) devices is presented. Deep reaction ion etching (DRIE) method described here reduces the loading effect and maintains a uniform etch rate resulting in highly vertical structures. A novel self-masking lithography and liftoff process was developed to ensure that the vertical mirrors undergo uniform metallization while leaving a transparent window for optical probing. Front side of a Si wafer was shallow-etched using DRIE to define an eventual optical window. This surface was then anodically bonded to a Pyrex wafer. Backside Si was then patterned to define thin channels around the optical window. These channels were vertically etched using DRIE, after which the unattached portions of the window region were removed. Negative photoresist was spun on the remaining vertical structures and the stack was exposed from the Pyrex side using Si structures as a self-mask. Subsequent metal sputtering and liftoff results in the metallized top and mirror sidewalls while leaving a clear window. These integrated mirrors and lids are then bonded to the active MEMS mirrors. Various processes and results are illustrated with an example of packaged corner cube retroreflectors (CCRs)
机译：提出了一种在硅中创建金属涂层垂直反射镜的方案，以及用于组装，包装和测试微机电系统（MEMS）器件的集成透明封装盖。本文所述的深反应离子蚀刻（DRIE）方法会降低加载效果并保持均匀的蚀刻速率，从而导致高度垂直的结构。开发了一种新颖的自掩膜光刻和剥离工艺，以确保垂直镜进行均匀的金属化，同时保留用于光学探测的透明窗口。使用DRIE对Si晶片的正面进行了浅蚀刻，以定义最终的光学窗口。然后将该表面阳极结合到派热克斯晶片上。然后对背面Si构图以在光学窗口周围限定薄通道。使用DRIE对这些通道进行垂直蚀刻，然后去除窗口区域的未连接部分。将负性光致抗蚀剂旋涂在剩余的垂直结构上，并使用Si结构作为自掩膜，从派热克斯（Pyrex）一侧露出堆叠。随后的金属溅射和剥离会导致金属化的顶部和镜面侧壁，同时保留透明的窗口。然后将这些集成的镜和盖结合到有源MEMS镜上。以封装的角锥后向反射器（CCR）为例说明了各种过程和结果

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号