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首页> 外文期刊>Journal of Microelectromechanical Systems >Frequency-Dependent Electrical and Thermal Response of Heated Atomic Force Microscope Cantilevers
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Frequency-Dependent Electrical and Thermal Response of Heated Atomic Force Microscope Cantilevers

机译：原子力显微镜悬臂的频率依赖性电和热响应

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摘要

This paper investigates the electrical and thermal response of the heated atomic force microscope (AFM) cantilevers in the frequency range from 10 Hz to 1 MHz. Spectrum analysis of the cantilever voltage response to periodic heating distinguishes different thermal behaviors of the cantilever in the frequency domain: the cantilever voltage at low frequencies is modulated by higher-order harmonics, and at high frequencies it oscillates with 1-$omega$ only. A simple model facilitates the understanding of complicated electrical and thermal behaviors in the cantilever, thus, it is possible to determine the cantilever temperature. The calculation predicts that temperature oscillation is restricted to the heater region when the cantilever is operated at about 10 kHz, suggesting that the periodic-heating operation of the cantilever may be employed for highly sensitive thermal metrology.2006-0010
机译：本文研究了加热原子力显微镜（AFM）悬臂在10 Hz至1 MHz频率范围内的电响应和热响应。悬臂电压对周期性加热的响应的频谱分析可区分悬臂在频域中的不同热行为：低频处的悬臂电压由高次谐波调制，而在高频处，其仅以1- $ω$振荡。一个简单的模型有助于理解悬臂中复杂的电气和热行为，因此可以确定悬臂温度。该计算预测，当悬臂以大约10 kHz的频率运行时，温度振荡将限制在加热器区域，这表明悬臂的周期性加热操作可用于高度敏感的热计量。2006-0010

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