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首页> 外文期刊>Journal of Microelectromechanical Systems >Experimental Measurements of the Strain Energy Release Rate for Stiction-Failed Microcantilevers Using a Single-Cantilever Beam Peel Test
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Experimental Measurements of the Strain Energy Release Rate for Stiction-Failed Microcantilevers Using a Single-Cantilever Beam Peel Test

机译：使用单悬臂梁剥离试验的静力失败微悬臂梁的应变能释放率的实验测量

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摘要

In this paper, we present experimental measurements of the strain energy release rate for stiction-failed polysilicon microcantilevers using a newly developed single cantilever beam peel test. Our experiments show that dry-contacting microcantilevers adhere exclusively as tip-stuck, "arc-shaped" stiction failures, while adhesion under "wet" conditions generate exclusively "s-shaped" stiction failures. Microcantilevers were "peeled" from the substrate under displacement control using a piezoelectric actuator attached to one end of an array of microcantilever beams. The crack length was monitored using interferometric imaging, and related to the applied displacement using established equations from linear elastic fracture mechanics. The pull-off forces associated with "arc-shaped" stiction failures were an average value of 89.7 nN, for 1000 mum long beams, and an average value of 123 nN for 1500 mum long beams. Adhesion energies for s-shaped failures were measured as 13.7 mJ/m2 for IPA released beams and 15.4 mJ/m2 for deionized water released beams. These values are in good agreement with previous measurements. The proposed experimental method enables application of a simple fracture mechanics model using a standard specimen geometry. These experiments, using both wet and dry adhesion failure conditions, show that the quality of the adhesive failure depends upon the magnitude of the forces pulling the microcantilever into contact with the underlying substrate
机译：在本文中，我们介绍了使用新开发的单悬臂梁剥离试验对静摩擦失败的多晶硅微悬臂梁的应变能释放速率的实验测量。我们的实验表明，干式接触微悬臂梁仅作为尖端粘滞的“弧形”附着力失效而粘附，而在“湿”条件下的粘附力仅产生“ s形”附着力失效。使用连接到微悬臂梁阵列一端的压电致动器，在位移控制下将微悬臂从基板上“剥离”。使用干涉成像技术监测裂纹长度，并使用线性弹性断裂力学建立的方程式将裂纹长度与施加的位移相关。与“弧形”静力破坏相关的拉力对于1000毫米长的梁为89.7 nN的平均值，对于1500毫米长的梁为123 nN的平均值。 s形破坏的粘合能测量为，IPA释放束为13.7 mJ / m2，去离子水释放束为15.4 mJ / m2。这些值与先前的测量非常吻合。所提出的实验方法使得能够使用标准试样几何形状来应用简单的断裂力学模型。这些使用湿式和干式粘合失效条件的实验表明，粘合失效的质量取决于拉动微悬臂梁与下层基材接触的力的大小。

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