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首页> 外文期刊>Journal of Microelectromechanical Systems >Surface-Micromachined Parylene Dual Valves for On-Chip Unpowered Microflow Regulation
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Surface-Micromachined Parylene Dual Valves for On-Chip Unpowered Microflow Regulation

机译：表面微加工聚对二甲苯双阀用于片上无动力微流调节

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This paper presents the world's first surface-micromachined parylene dual-valved microfluidic system for on-chip unpowered microflow regulation. Incorporating a normally closed and a normally open passive check valve in a back-to-back configuration inside a microchannel, the dual-valved system has successfully regulated the pressure/flow rate of air and liquid without power consumption or electronic/magnetic/thermal transduction. By exclusively using parylene C (poly-para-xylylene C) as the structural material, the fabricated valves have higher flexibility to shunt flows in comparison to other conventional thin-film valves. A state-of-the-art multilayer polymer surface- micromachining technology is applied here to fabricate parylene microvalves of various designs. The parylene-based devices are completely biocompatible/implantable and provide an economical paradigm for fluidic control in integrated lab-on-a-chip systems. Design, fabrication, and characterization of the parylene dual valves are discussed in this paper. Testing results have successfully demonstrated that the microflow regulation of the on-chip dual-valved system can achieve a bandpass profile in which the pressure control range is 0-50 mmHg with corresponding flow rates up to 2 mL/min for air flow and 1 $mu$L/min flow rate for water flow. This regulation range is suitable for controlling biological conditions in human health care, with potential applications including drug delivery and regulation of elevated intraocular pressure (IOP) in glaucoma patients.2006-0126
机译：本文介绍了世界上第一个用于片上无动力微流调节的表面微加工聚对二甲苯双阀微流控系统。双阀系统在微通道内背对背配置了常闭和常开的被动止回阀，该双阀系统已成功调节了空气和液体的压力/流速，而没有功耗或电子/磁性/热传导。通过仅使用聚对二甲苯C（聚对二甲苯C）作为结构材料，与其他传统的薄膜阀相比，所制造的阀具有更高的灵活性来分流。这里采用了先进的多层聚合物表面微加工技术来制造各种设计的聚对二甲苯微阀。基于聚对二甲苯的设备是完全生物相容性/可植入的，并为集成的单芯片实验室系统中的流体控制提供了一种经济的范例。本文讨论了聚对二甲苯双阀的设计，制造和特性。测试结果已成功证明，片上双阀系统的微流量调节可实现带通曲线，其中压力控制范围为0-50 mmHg，相应的空气流量为2 mL / min，流量为1 $水流量的最小流速为L / min。此调节范围适用于控制人类医疗保健中的生物学状况，具有潜在的应用，包括在青光眼患者中给药和调节眼内压升高（IOP）。2006-0126

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