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首页> 外文期刊>Journal of Microelectromechanical Systems >Side-Wall Vertical Electrodes for Lateral Field Microfluidic Applications
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Side-Wall Vertical Electrodes for Lateral Field Microfluidic Applications

机译：侧墙微流体应用的侧壁垂直电极

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This paper describes the design, fabrication, and testing of microfluidic devices enabled by electrodes embedded vertically in the side walls of SU-8 microchannels. With vertical electrodes on the side walls, one can generate higher lateral electrical fields uniform along the vertical direction in the channel (perpendicular to the substrate). By designing the electrode shapes and configurations, uniform and nonuniform electrical fields in the lateral (planar) directions can be applied to manipulate flow or particles in microchannels for switching or sorting applications. The uniform field is demonstrated in a magnetohydrodynamic (MHD) microfluidic device for directing cells to different channel outlets while the nonuniform field is demonstrated in the generation of dielectrophoresis (DEP) forces for microbead focusing. Metal electrodes are fabricated by electroplating to form vertical electrodes aligned with the channel walls. The multilayer SU-8 lithography technique enables the four walls of the channel to be all SU-8. The thin precoated SU-8 layer on the substrate improves structure integrity of the SU-8 microchannels. The mechanical flexibility of PDMS compensates for the surface nonuniformity from the previous patterning steps to conformably cap the channel. The ability to integrate versatile electrodes design broadens the realm of electrical control and sensing for microfluidic applications.2006-0106
机译：本文介绍了通过在SU-8微通道侧壁上垂直嵌入的电极实现的微流控设备的设计，制造和测试。在侧壁上具有垂直电极的情况下，一个人可以在通道中垂直于基板的垂直方向上产生较高的横向电场。通过设计电极的形状和配置，可以在横向（平面）方向上施加均匀和不均匀的电场，以控制微通道中的流动或颗粒，以进行切换或分类应用。在磁流体动力学（MHD）微流控设备中证明了均匀的电场，该装置可将细胞引导至不同的通道出口，而在介电电泳（DEP）力的产生中证明了非均匀场的微珠聚焦。通过电镀制造金属电极以形成与通道壁对准的垂直电极。多层SU-8光刻技术使通道的四壁全部为SU-8。基板上的薄预涂SU-8层改善了SU-8微通道的结构完整性。 PDMS的机械柔韧性可补偿先前构图步骤中的表面不均匀性，从而均匀地覆盖通道。集成通用电极设计的能力拓宽了微流控应用的电气控制和传感领域。2006-0106

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