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首页> 外文期刊>Journal of Microelectromechanical Systems >Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection
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Vacuum-Packaged Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection

机译：真空包装的悬浮微通道共振质量传感器，用于生物分子检测

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There is a great need in experimental biology for tools to study interactions between biological molecules and to profile expression levels of large numbers of proteins. This paper describes the fabrication, packaging and testing of a resonant mass sensor for the detection of biomolecules in a microfluidic format. The transducer employs a suspended microchannel as the resonating element, thereby avoiding the problems of damping and viscous drag that normally degrade the sensitivity of resonant sensors in liquid. Our device differs from a vibrating tube densitometer in that the channel is very thin, which enables the detection of molecules that bind to the channel walls; this provides a path to specificity via molecular recognition by immobilized receptors. The fabrication is based on a sacrificial polysilicon process with low-stress low-pressure chemical-vapor deposited (LPCVD) silicon nitride as the structural material, and the resonator is vacuum packaged on the wafer scale using glass frit bonding. Packaged resonators exhibit a sensitivity of 0.8 ppm/(ngmiddotcm2) and a mechanical quality factor of up to 700. To the best of our knowledge, this quality factor is among the highest so far reported for resonant sensors with comparable surface mass sensitivity in liquid
机译：在实验生物学中，非常需要研究生物分子之间的相互作用并分析大量蛋白质表达水平的工具。本文介绍了一种共振质量传感器的制造，包装和测试，该传感器用于检测微流体形式的生物分子。该换能器采用悬浮的微通道作为谐振元件，从而避免了通常会降低液体中谐振传感器灵敏度的阻尼和粘性阻力问题。我们的设备与振动管密度计的不同之处在于，通道非常细，可以检测与通道壁结合的分子。这通过固定受体的分子识别提供了特异性途径。该制造基于牺牲性多晶硅工艺，并采用低应力低压化学气相沉积（LPCVD）氮化硅作为结构材料，并且使用玻璃料粘结将谐振器真空封装在晶圆级上。封装谐振器的灵敏度为0.8 ppm /（ngmiddotcm2），机械品质因数最高为700。据我们所知，该品质因数是迄今为止在液体中具有可比的表面质量灵敏度的谐振传感器中报道的最高的之一

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