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Piezoresistive Microphone Design Pareto Optimization: Tradeoff Between Sensitivity and Noise Floor

机译:压阻麦克风设计帕累托优化:灵敏度与本底噪声之间的权衡

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This paper addresses tradeoffs between pressure sensitivity and electronic noise floor in optimizing the performance of a piezoresistive microphone. A design optimization problem is formulated to find the optimum dimensions of the diaphragm, the piezoresistor geometry and location for two objective functions: maximum pressure sensitivity and minimum electronic noise floor. The Pareto curve of optimum designs for both objectives is generated. The minimum detectable pressure (MDP) was also employed as an objective function, generating a point on the Pareto curve that may be the best compromise between the original two objectives. The results indicated that this application the critical constraints are the linearity and power consumption. The minimized MDP design was less sensitive to uncertainty in design variables. The optimization methodology presented in this paper as well as some of the conclusions are applicable to other types of piezoresistive sensors
机译:本文讨论了在优化压阻麦克风性能时压力灵敏度和电子本底噪声之间的权衡。制定了一个设计优化问题,以找到膜片的最佳尺寸,压敏电阻的几何形状和位置,以实现两个目标功能:最大压力灵敏度和最小电子本底噪声。生成了针对两个目标的最佳设计的帕累托曲线。最小可检测压力(MDP)也用作目标函数,在帕累托曲线上生成一个点,这可能是原始两个目标之间的最佳折衷。结果表明,该应用的关键约束是线性度和功耗。最小化的MDP设计对设计变量的不确定性较不敏感。本文介绍的优化方法以及一些结论适用于其他类型的压阻传感器

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