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首页> 外文期刊>Journal of Microelectromechanical Systems >Surface and Bulk-Silicon-Micromachined Optical Displacement Sensor Fabricated With the SwIFT-Lite Process
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Surface and Bulk-Silicon-Micromachined Optical Displacement Sensor Fabricated With the SwIFT-Lite Process

机译：SwIFT-Lite工艺制造的表面和大块硅微机械光学位移传感器

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摘要

For many micromachined sensors such as microphones and accelerometers, optical displacement sensing may have advantages over capacitive sensing - offering potentially high-displacement sensitivity independent of sensor area and gap height. A particular diffraction-based optical displacement sensor design consisting of a sensing diaphragm suspended over a rigid grated electrode has demonstrated advantages in terms of sensitivity, integration and stability. When illuminated from the backside, this structure generates a zeroth and complementary higher order diffracted beams whose intensities are modulated by the diaphragm displacement with the sensitivity of a regular Michelson interferometer. In previous work, acoustic devices surface micromachined on quartz substrates using aluminum for the diaphragm and grating were presented and characterized. In this work, we present the fabrication and characterization of a surface- and bulk-silicon micromachined diffraction-based optical microphone structure fabricated with Sandia National Laboratories' SwIFT-Lite process, which uses silicon nitride and polysilicon structural materials that have been employed extensively in MEMS and form a more thermally matched material set robust against corrosion and fatigue. The process introduces a new design space to microscale optical displacement sensing, enabling large, soft structures with perforated back-plates ideal for microphone and inertial-sensor designs.
机译：对于许多微机械传感器，例如麦克风和加速度计，光学位移传感可能比电容传感具有优势-提供潜在的高位移灵敏度，而与传感器面积和间隙高度无关。由悬浮在刚性光栅电极上的传感膜片组成的基于衍射的特殊光学位移传感器设计在灵敏度，集成度和稳定性方面已显示出优势。当从背面照亮时，此结构会产生零级和互补的高阶衍射光束，其强度由光阑位移以常规迈克尔逊干涉仪的灵敏度进行调制。在以前的工作中，介绍并表征了使用铝作为振动膜和光栅在石英基板上进行微加工的声学设备。在这项工作中，我们介绍了使用Sandia National Laboratories的SwIFT-Lite工艺制造的基于表面和体硅微机械衍射的光学传声器结构的制造和特性，该工艺使用了氮化硅和多晶硅结构材料，这些材料已广泛应用于MEMS并形成一种更热匹配的材料集，能够抵抗腐蚀和疲劳。该工艺为微型光学位移感测引入了一个新的设计空间，从而实现了带有穿孔背板的大型，柔软结构，非常适合麦克风和惯性传感器设计。

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