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首页> 外文期刊>Journal of Microelectromechanical Systems >Reconfigurable Millimeter-Wave Filters Using CPW-Based Periodic Structures With Novel Multiple-Contact MEMS Switches
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Reconfigurable Millimeter-Wave Filters Using CPW-Based Periodic Structures With Novel Multiple-Contact MEMS Switches

机译：使用基于CPW的周期性结构和新型多触点MEMS开关的可重构毫米波滤波器

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摘要

In this paper, Fully monolithic reconfigurable mil limeter-wave filters are proposed using the CPW-based periodic structures with novel multiple-contact MEMS switches. Mil limeter-wave low-pass and band-pass filters were designed, fabricated, and tested. Three cascaded CPW-based periodic structures, with low-pass and band-pass intrinsic filtering char acteristics, are reconfigured into a self-similar single unit cell by the operation of the novel multiple-contact MEMS switches with single actuation. By using the multiple-contact MEMS switches, the insertion loss can be reduced and the operating frequency ranges are extended to millimeter-waves with little increase of loss. Additionally, the number of the switching elements has been reduced and the bias-decoupling circuits are not required, resulting in a very small chip size. The measured results of the re- configurable low-pass filter show the 3-dB cutoff frequency change from 67 to 28 GHz with very small change in the insertion loss from 0.32 to 0.27 dB. The center frequency of the reconfigurable band-pass filter is tuned from 55 to 20 GHz, and the measured 3-dB cutoff bandwidth changed from 32 to 12 GHz, while the average insertion loss changed from 1.27 to 1.61 dB. The chip size of the low-pass and band-pass filter including dc bias line is 1.2 mm × 1.5 mm and 1.2 mm × 4.5 mm, respectively.
机译：在本文中，使用基于CPW的周期性结构和新型多触点MEMS开关，提出了完全单片可重构的毫米波滤波器。设计，制造和测试了米尔石灰波低通和带通滤波器。通过新颖的单触点多触点MEMS开关的操作，将具有低通和带通固有滤波特性的三种基于CPW的周期性结构重新配置为自相似的单晶胞。通过使用多触点MEMS开关，可以减少插入损耗，并且将工作频率范围扩展到毫米波，而损耗几乎没有增加。另外，减少了开关元件的数量，并且不需要偏置去耦电路，从而导致非常小的芯片尺寸。可重新配置的低通滤波器的测量结果表明，从67 GHz到28 GHz的3 dB截止频率变化，而插入损耗从0.32 dB到0.27 dB的变化很小。可重新配置的带通滤波器的中心频率从55调谐到20 GHz，测得的3 dB截止带宽从32改变到12 GHz，而平均插入损耗从1.27改变到1.61 dB。包括直流偏置线的低通和带通滤波器的芯片尺寸分别为1.2 mm×1.5 mm和1.2 mm×4.5 mm。

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