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首页> 外文期刊>Microelectronic Engineering >Direct writing of individual microanofiber patterns suitable for flexible electronics using MEMS-based microneedle
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Direct writing of individual microanofiber patterns suitable for flexible electronics using MEMS-based microneedle

机译：直接写入适用于基于MEMS的微针的柔性电子器件的单独微/纳米纤维图案

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摘要

Microano fiber structures can be printed on a non-conducting substrate by applying an electrohydrodynamic (EHD) direct-writing technique. The combination of Wet Etching and Deep Reactive Ion Etching is used to fabricate a hollow micro-needles array as spinneret (microneedle with the 40 mu m hole diameter, 80 mu m outer diameter, and 100 mu m height). An experimental mechano-electrospinning setup was designed and implemented to deposit single micro-nano fiber patterns. Microneedle and plastic syringe are mounted as two different spinnerets in this setup. Different shapes and sizes fibers are created by two mentioned spinnerets. This setup can control the distance and the voltage between spinneret and collector, collector speed, and fluid flow rate. The mean width of the electro-spun straight-line single fiber decreases from 1.4 to 0.5 mu m by the microneedle and from 3.5 to 0.85 mu m by plastic syringe when the velocity of the substrate increased from 50 to 200 mm/s. By changing the collector speed from 20 to 60 mm/s, various single microanofiber patterns electrospun by microneedle such as sinusoidal, helical, hat-shaped, and straight-line are achieved at 1-2.5 kV voltage, 1 mm collector to microneedle distance, 0.1 mL/h flow rate, and 23 Wt% polymer solution concentration. Because of electrical repulsive force, the single charged fiber is developed in a path parallel to the margin of the previously developed charged pattern on the substrate. Single fiber with sinusoidal, hat-shaped, and helical patterns can be used in special applications such as flexible and printed electronics.
机译：可以通过施加电液动力学（EHD）直接写入技术来在非导电基板上印刷微/纳米纤维结构。湿法蚀刻和深反应离子蚀刻的组合用于制造作为喷丝头的中空微针阵列（具有40μm孔直径，80μm外径和100μm高度的微针）。设计并实施了实验机械静电纺丝装置，以沉积单一微纳米纤维图案。微针和塑料注射器在该设置中安装为两个不同的喷丝头。不同的形状和尺寸的纤维由两个提到的喷丝腹部产生。该设置可以控制喷丝头和集电极，收集器速度和流体流量之间的距离和电压。当基板的速度从50升至200mm / s时，通过微针的直线单纤维的平均宽度从微小的直线单纤维和3.5至0.85μm降低3.5至0.85μm。通过将收集器速度从20至60mm / s改变，通过微针，诸如正弦，螺旋，帽形和直线上的各种单个微/纳米纤维图案静电纺器纺，例如在1-2.5kV电压，1mm收集器到微针距离，0.1mL / h流速和23wt％的聚合物溶液浓度。由于电排斥力，单个带电纤维在与先前在基板上的先前产生的带电图案的边缘平行的路径中开发。具有正弦，帽形和螺旋图案的单纤维可用于特殊应用，如柔性和印刷电子设备。

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