Fabricating metal nanoparticle arrays at specified and localized regions of microfluidic chip for LSPR sensing

Liu Yu; Xie Shiwei; Xiao Xiao; Li Shuhong; Gao Fuhua; Zhang Zhiyou; Du Jinglei

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Fabricating metal nanoparticle arrays at specified and localized regions of microfluidic chip for LSPR sensing

机译：在微流控芯片的特定区域和局部区域制造金属纳米粒子阵列以进行LSPR感测

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Miniaturization and high integration are important issues for developments of lab-on-a-chip devices. Benefitting from the advantages of localized surface plasmon resonance (LSPR) sensors in field of biological and chemical detection, many novel applications can be brought by integrating the sensors into small size microfluidic chips. A variety of fabrication methods integrating a LSPR sensor into a chip have been reported, nevertheless, it remains a challenge to assemble regular metallic nanoparticle (NP) array in subtle microchannels economically. In this paper, a low-cost and high-efficiency fabrication method is proposed to assemble LSPR sensing regions into a microfluidic chip. Combining efficient traditional lithography, nanosphere lithography and mask deposition techniques, inerratic triangular metal NPs can be developed at specified and localized regions in microgrooves of a substrate to form different and separate LSPR sensors. Two specified local regions of silver NPs in glass substrate were successfully fabricated: one in the middle of a line-shape microchannel and the other in the cross regions of two crossed microchannels. Sensitivity test of a packaged sensor chip demonstrates that LSPR characteristics of the silver NPs in the channel have been well preserved. All the experimental results manifest that our fabrication method is an effective and economical way for integrating metal NP arrays into multichannel microfluidic chips, which can prompt practical applications of multifunctional lab-on-a-chip devices. (C) 2015 Elsevier B.V. All rights reserved.

机译：小型化和高集成度是芯片实验室设备发展的重要问题。得益于生物化学检测领域中局部表面等离子体激元共振（LSPR）传感器的优势，将传感器集成到小尺寸微流控芯片中可以带来许多新颖的应用。已经报道了将LSPR传感器集成到芯片中的各种制造方法，然而，在微妙的微通道中经济地组装规则的金属纳米颗粒（NP）阵列仍然是一个挑战。本文提出了一种低成本，高效率的制造方法，将LSPR传感区域组装成微流控芯片。结合有效的传统光刻技术，纳米球光刻技术和掩模沉积技术，可以在衬底微槽的指定区域和局部区域开发出不规则的三角形金属NP，从而形成不同且分离的LSPR传感器。成功地在玻璃基板中制造了两个特定的银纳米颗粒局部区域：一个位于线形微通道的中间，另一个位于两个交叉微通道的交叉区域。封装传感器芯片的灵敏度测试表明，通道中银NP的LSPR特性得到了很好的保留。所有的实验结果表明，我们的制造方法是一种将金属NP阵列集成到多通道微流控芯片中的有效而经济的方法，可以促进多功能芯片实验室设备的实际应用。（C）2015 Elsevier B.V.保留所有权利。

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来源
《Microelectronic Engineering》 |2016年第2期|7-11|共5页
作者
Liu Yu; Xie Shiwei; Xiao Xiao; Li Shuhong; Gao Fuhua; Zhang Zhiyou; Du Jinglei;
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作者单位

Sichuan Univ, Coll Phys Sci & Technol, Chengdu 610064, Peoples R China|Sichuan Univ, Key Lab High Energy Dens Phys & Technol, Minist Educ, Chengdu 610064, Peoples R China;

Sichuan Univ, Coll Phys Sci & Technol, Chengdu 610064, Peoples R China|Sichuan Univ, Key Lab High Energy Dens Phys & Technol, Minist Educ, Chengdu 610064, Peoples R China;

Sichuan Univ, Coll Phys Sci & Technol, Chengdu 610064, Peoples R China|Sichuan Univ, Key Lab High Energy Dens Phys & Technol, Minist Educ, Chengdu 610064, Peoples R China;

Sichuan Univ, Coll Phys Sci & Technol, Chengdu 610064, Peoples R China|Sichuan Univ, Key Lab High Energy Dens Phys & Technol, Minist Educ, Chengdu 610064, Peoples R China;

Sichuan Univ, Coll Phys Sci & Technol, Chengdu 610064, Peoples R China|Sichuan Univ, Key Lab High Energy Dens Phys & Technol, Minist Educ, Chengdu 610064, Peoples R China|Sichuan Univ, Sinobritish Joint Mat Res Inst, Chengdu 610064, Peoples R China;

Sichuan Univ, Coll Phys Sci & Technol, Chengdu 610064, Peoples R China|Sichuan Univ, Key Lab High Energy Dens Phys & Technol, Minist Educ, Chengdu 610064, Peoples R China;

Sichuan Univ, Coll Phys Sci & Technol, Chengdu 610064, Peoples R China|Sichuan Univ, Key Lab High Energy Dens Phys & Technol, Minist Educ, Chengdu 610064, Peoples R China;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类
关键词
Microfluidic; Self-assembly; Lab-on-a-chip; Nanosphere lithography; Localized surface plasmon resonance;

机译：微流控;自组装;单芯片实验室;纳米球光刻;局部表面等离子体激元共振;

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1. 3D Microfluidic Surface-Enhanced Raman Spectroscopy (SERS) Chips Fabricated by All-Femtosecond-Laser-Processing for Real-Time Sensing of Toxic Substances [J] . Bai Shi, Serien Daniela, Hu Anming, Advanced Functional Materials . 2018,第23期

机译：全飞秒激光加工制造的3D微流控表面增强拉曼光谱（SERS）芯片可实时检测有毒物质
2. Plasmon Resonance Hybridization in Self-Assembled Copper Nanoparticle Clusters: Efficient and Precise Localization of Surface Plasmon Resonance (LSPR) Sensing Based on Fano Resonances [J] . Ahmadivand Arash, Pala Nezih Applied Spectroscopy: Society for Applied Spectroscopy . 2015,第2期

机译：自组装铜纳米粒子簇中的等离子体共振杂交：基于Fano共振的表面等离子体共振（LSPR）传感的高效且精确的定位。
3. Localized surface plasmon resonance (LSPR) of polyelectrolyte-functionalized gold-nanoparticles for bio-sensing [J] . Li X, Jiang L, Zhan QQ, Colloids and Surfaces, A. Physicochemical and Engineering Aspects . 2009,第2a3期

机译：聚电解质功能化金纳米粒子的局部表面等离子体共振（LSPR），用于生物传感
4. Key technologies for LSPR-sensing microfluidic biochip [C] . WANG Hao, LUO Xiangang, YAO Hanmin, International Symposium on Advanced Optical Manufacturing and Testing Technologies; 20070708-12; Chengdu(CN) . 2007

机译：LSPR传感微流控生物芯片的关键技术
5. Cooperative effect of ionic liquid solvents in microfluidic devices for fabricating monodisperse metal nanoparticles. [D] . Lazarus, Laura L. 2012

机译：离子液体溶剂在微流控装置中制造单分散金属纳米粒子的协同作用。
6. Development of gold nanoparticle-aptamer-based LSPR sensing chips for the rapid detection of Salmonella typhimurium in pork meat [O] . Seo Yeong Oh, Nam Su Heo, Shruti Shukla, -1

机译：基于金纳米粒子-适体的LSPR传感芯片的开发用于猪肉中鼠伤寒沙门氏菌的快速检测
7. Development of gold nanoparticle-aptamer-based LSPR sensing chips for the rapid detection of Salmonella typhimurium in pork meat [O] . Seo Yeong Oh, Nam Su Heo, Shruti Shukla, 2017

机译：基于金纳米粒子 - 适体的LSPR传感芯片的发展，用于快速检测猪肉中的沙门氏菌

Fabricating metal nanoparticle arrays at specified and localized regions of microfluidic chip for LSPR sensing

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