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首页> 外文期刊>Microelectronic Engineering >Measurement and simulation of the pull-off strength at the separation of miniaturized 3D connectors consisting of silicon masters with undercuts and PDMS replicas
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Measurement and simulation of the pull-off strength at the separation of miniaturized 3D connectors consisting of silicon masters with undercuts and PDMS replicas

机译：微型3D连接器分离时的抗拉强度的测量和模拟，该3D连接器由带有底切和PDMS复制品的硅母板组成

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摘要

Applications in various sectors of microtechnology such as MEMS, microfluidics, and lab on chip call for reliable low-cost joining approaches that are detachable and re-dosable, providing a tight fit at the micron level. Dovetail-like structures are a promising approach to realize the female side of such connectors and moulding is a suitable technique to produce the counterpart that completes the joint. Force-displacement measurements were performed for 2 x 2 cm2 master-replica assemblies, prepared from Si and PDMS (polydimethylsiloxane) and featuring dovetail-like structures with different undercuts. For measurement a miniaturised force-displacement tester was set up. Maximum retention forces of up to about 60 mN per trench of 1 cm length were measured for lines with 11.5 urn wide undercuts. Finite element modelling using a linear elastic model was employed to simulate the local distribution of stress and strain in the PDMS under loading with an applied tensile force. The simulation results approximate the measurements well. The quantitative results obtained can be used for designing miniaturized connectors with undercuts.
机译：MEMS，微流体技术和芯片实验室等微技术各个领域的应用都要求提供可拆卸和可重新配给的可靠低成本连接方法，以提供微米级的紧密配合。燕尾状结构是实现此类连接器阴侧的一种有前途的方法，模制是生产完成接头的配对件的合适技术。对由Si和PDMS（聚二甲基硅氧烷）制得的2 x 2 cm2主副本组件执行力-位移测量，其特征是燕尾状结构具有不同的咬边。为了进行测量，安装了微型力位移测试仪。对于宽度为11.5微米的底切线，测量的最大固位力为每条1厘米长的沟槽约60 mN。采用线性弹性模型进行有限元建模，以模拟施加载荷后PDMS中应力和应变的局部分布。仿真结果很好地近似了测量结果。获得的定量结果可用于设计带有底切的小型连接器。

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  • 来源
    《Microelectronic Engineering》 |2013年第1期|31-36|共6页
  • 作者

    J. Zajadacz; P. Lorenz; M. Ehrhardt; K. Zimmer; S. Moellenbeck; K. Dhima; H.-C. Scheer;

  • 作者单位

    Leibniz-Institute of Surface Modification, Permoserstr. 15, D-04318 Leipzig, Germany;

    Leibniz-Institute of Surface Modification, Permoserstr. 15, D-04318 Leipzig, Germany;

    Leibniz-Institute of Surface Modification, Permoserstr. 15, D-04318 Leipzig, Germany;

    Leibniz-Institute of Surface Modification, Permoserstr. 15, D-04318 Leipzig, Germany;

    Department of Electrical and Information Engineering, University of Wuppertal, Rainer-Gruenter-Str. 21, D-42119 Wuppertal, Germany;

    Department of Electrical and Information Engineering, University of Wuppertal, Rainer-Gruenter-Str. 21, D-42119 Wuppertal, Germany;

    Department of Electrical and Information Engineering, University of Wuppertal, Rainer-Gruenter-Str. 21, D-42119 Wuppertal, Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    undercut 3D patterns; moulding; PDMS; force-displacement measurement; FEM simulation;

    机译：底切3D图案;模制PDMS;力-位移测量;有限元模拟;

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