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首页> 外文期刊>Microelectronic Engineering >Writing metal on SiO_2 by laser through culture supernatant of Acidithiobacillus ferrooxidans 13820
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Writing metal on SiO_2 by laser through culture supernatant of Acidithiobacillus ferrooxidans 13820

机译:通过酸性氧化亚铁硫杆菌13820的培养上清液在SiO_2上用激光写入金属

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摘要

This paper presents an innovative method for the laser-assisted chemical liquid phase deposition using Acidithiobacillus ferrooxidans (At. ferrooxidans 13820) culture supernatant. At. ferrooxidans 13820 culture supernatant was used for bioleaching of the copper. The obtained copper solution in this process was then used as deposition precursor for direct writing on substrate surface by laser. The feasibility of copper deposition was studied with a 1064 and 532 nm Nd:YAG laser to form desired patterns. It is observed that there is a positive correlation between the deposition amount and the laser power, scan repetitions and reciprocal of scanning speed, respectively. The choice of the substrate is mainly determined by the application domain including polyimide, Si and SiO_2. The effect of substrate on the deposition lines was studied by setting laser source at 532 nm. As compared to other substrates, SiO_2 showed better performance of deposition continuity. Better deposition was obtained with less energy consumption, by changing laser source from 1064 to 532 nm. Combining the etching and the laser-guided writing through At. ferrooxidans 13820 culture supernatant provides an innovative and cleaner way of producing metallic microstructures.
机译:本文提出了一种创新的方法,利用酸性氧化硫杆菌(At。ferrooxidans 13820)培养上清液进行激光辅助化学液相沉积。在。用氧化亚铁13820培养物上清液对铜进行生物浸出。然后将在该过程中获得的铜溶液用作沉积前驱体,以通过激光直接在基板表面上写入。用1064和532 nm Nd:YAG激光器研究了铜沉积的可行性,以形成所需的图案。可以看出,沉积量和激光功率,扫描重复次数和扫描速度的倒数分别成正相关。基材的选择主要取决于包括聚酰亚胺,Si和SiO_2在内的应用领域。通过将激光源设置为532 nm,研究了基板对沉积线的影响。与其他基材相比,SiO_2表现出更好的沉积连续性。通过将激光源从1064更改为532 nm,可以以更少的能量消耗获得更好的沉积。结合蚀刻和通过At的激光引导写入。三氧化二铁13820培养上清液提供了一种创新且清洁的方法来生产金属微结构。

著录项

  • 来源
    《Microelectronic Engineering》 |2013年第1期|17-22|共6页
  • 作者单位

    Department of Power Mechanical Engineering, National Tsing Hua University, No. 101, Sec. 2, Kuang Fu Rd., 30013 Hsinchu, Taiwan, ROC;

    Department of Power Mechanical Engineering, National Tsing Hua University, No. 101, Sec. 2, Kuang Fu Rd., 30013 Hsinchu, Taiwan, ROC;

    Department of Power Mechanical Engineering, National Tsing Hua University, No. 101, Sec. 2, Kuang Fu Rd., 30013 Hsinchu, Taiwan, ROC;

    Department of Power Mechanical Engineering, National Tsing Hua University, No. 101, Sec. 2, Kuang Fu Rd., 30013 Hsinchu, Taiwan, ROC;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    laser-assisted deposition; acidithiobacillus ferrooxidans 13820 culture; supernatant; patterning metallic microstructure;

    机译:激光辅助沉积酸性硫氧亚铁氧化铁13820培养物;上清液图案化金属微结构;

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