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Development of reel-to-reel process system for roller-imprint on plastic fibers

机译：用于在塑料纤维上辊压印的卷到卷工艺系统的开发

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摘要

We are developing a woven fabric of micro-electro-mechanical-systems (MEMS) where smart fibers are woven to make large-size flexible devices. MEMS structures and electric circuits are formed on the surface of individual fibers to serve as smart fibers where they can function as sensors and actuators. Moreover, when smart fibers are inter-woven it becomes necessary to process electric contact and physical positioning guides on the surfaces of warp and woof fibers. To transfer various patterns on the surface of a fiber at high speed, a batch process by thermal nanoimprinting is pursued. We then developed a new-type roller nanoimprint system to precisely transfer fine patterns from a plane mold onto the curved surface of a fibrous substrate. In this system, a fiber is sandwiched by two molds and rolls under the traction force of sliding molds traveling in opposite directions. At the end of their travel the molds are separated. The molds are moved in directions opposite to their previous directions of travel. This brings the molds back to their inital positions. Then, the fiber is moved by a preset distance using a reel-to-reel feeder. A new cycle starts again. With this method, 5-um-width square and 5-μm-diameter circular dotted patterns with 10 μm pitch were successfully transferred onto a 250-μm-diameter plastic optical fiber (POF) covering its full surface. Moreover, we succeeded in a continuous molding on the entire curved surface of 1.6 m long POF using a reel-to-reel feeder as a batch processing operation with a pitch of 16 mm by a repetition of roller-imprinting for 100 times. No significant difference was observed when the shapes and depths of the imprinted patterns obtained from the first imprinting were compared with those of obtained from the 100th imprinting.
机译：我们正在开发一种微机电系统（MEMS）的机织织物，在该机织织物中，智能纤维被编织成大型柔性设备。 MEMS结构和电路形成在单根光纤的表面上，用作智能光纤，在其中它们可以充当传感器和致动器。此外，当智能纤维交织时，必须处理经线和纬线纤维表面上的电接触和物理定位向导。为了将各种图案高速转印到纤维表面上，进行了通过热纳米压印的分批处理。然后，我们开发了一种新型的辊式纳米压印系统，以将精细图案从平面模具精确地转印到纤维基材的曲面上。在该系统中，纤维在两个沿相反方向行进的滑动模具的牵引力的作用下被两个模具和辊夹住。在行程结束时，将模具分开。模具沿与其先前行进方向相反的方向移动。这将使模具恢复其初始位置。然后，使用卷到卷进纸器将光纤移动预设距离。新的循环再次开始。通过这种方法，将具有10μm间距的5um正方形和5μm直径的圆形圆点图案成功转移到覆盖其整个表面的250μm直径的塑料光纤（POF）上。此外，我们通过使用卷对卷进纸器作为批量处理操作，通过重复压印100次，以16 mm的间距，在1.6 m长的POF整个曲面上连续模制成功。将第一个压印获得的压印图案的形状和深度与第100个压印获得的压印图案的形状和深度进行比较时，没有发现显着差异。

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  • 来源
    《Microelectronic Engineering》 |2011年第8期|p.2059-2062|共4页
  • 作者

    Harutaka Mekaru; Akihiro Ohtomo; Hideki Takagi; Mitsunori Kokubo; Hiroshi Goto;

  • 作者单位

    Macro Bio-Electromechanical-Autonomous-Nano-Systems (BEANS) Center, BEANS Project. 1-2-1, Namiki, Tsukuba, Ibaraki 305-8564, Japan Research Center for Ubiquitous MEMS and Micro Engineering, National Institute of Advanced Industrial Science and Technology (A1ST), 1-2-1, Namiki, Tsukuba,Ibaraki 305-8564, Japan Macro Bio-Electromechanical-Autonomous-Nano-Systems (BEANS) Center, BEANS Project. 1-2-1, Namiki. Tsukuba, Ibaraki 305-8564, Japan;

    Macro Bio-Electromechanical-Autonomous-Nano-Systems (BEANS) Center, BEANS Project. 1-2-1, Namiki, Tsukuba, Ibaraki 305-8564, Japan Toshiba Machine Co., Ltd., 2063-3, Ooka, Numazu, Shizuoka 410-8510, Japan;

    Macro Bio-Electromechanical-Autonomous-Nano-Systems (BEANS) Center, BEANS Project. 1-2-1, Namiki, Tsukuba, Ibaraki 305-8564, Japan Research Center for Ubiquitous MEMS and Micro Engineering, National Institute of Advanced Industrial Science and Technology (A1ST), 1-2-1, Namiki, Tsukuba,Ibaraki 305-8564, Japan;

    Macro Bio-Electromechanical-Autonomous-Nano-Systems (BEANS) Center, BEANS Project. 1-2-1, Namiki, Tsukuba, Ibaraki 305-8564, Japan Research Center for Ubiquitous MEMS and Micro Engineering, National Institute of Advanced Industrial Science and Technology (A1ST), 1-2-1, Namiki, Tsukuba,Ibaraki 305-8564, Japan;

    Macro Bio-Electromechanical-Autonomous-Nano-Systems (BEANS) Center, BEANS Project. 1-2-1, Namiki, Tsukuba, Ibaraki 305-8564, Japan Toshiba Machine Co., Ltd., 2063-3, Ooka, Numazu, Shizuoka 410-8510, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    roller nanoimprint. reel-to-reel process; plastic optical fiber; electroformed-ni mold; mems;

    机译：滚子纳米压印。卷到卷工艺;塑料光纤;电铸镍模具;记忆体;

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