Silicon nanowires by combined nanoimprint and angle deposition for gas sensing applications

著录项

• 来源
  《Microelectronic Engineering》 |2011年第8期|p.2100-2104|共5页
• 作者

  Chen Gao; Zhen-Cheng Xu; Shao-Ren Deng; Jing Wan; Yifang Chen; Ran Liu; Ejaz Huq; Xin-PingQu;

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• 作者单位

  State Key Lab of ASIC and System, Department of Microelectronics. Fudan University, Shanghai 200433, China;

  State Key Lab of ASIC and System, Department of Microelectronics. Fudan University, Shanghai 200433, China;

  State Key Lab of ASIC and System, Department of Microelectronics. Fudan University, Shanghai 200433, China;

  State Key Lab of ASIC and System, Department of Microelectronics. Fudan University, Shanghai 200433, China;

  Rutherford Appleton Laboratory, Chilton, Didcot, Oxon 0X11 OQX. UK Nanoscience & Nanotechnology, Micro and Nanotechnology Centre, UK;

  State Key Lab of ASIC and System, Department of Microelectronics. Fudan University, Shanghai 200433, China;

  Rutherford Appleton Laboratory, Chilton, Didcot, Oxon 0X11 OQX. UK;

  State Key Lab of ASIC and System, Department of Microelectronics. Fudan University, Shanghai 200433, China School of Microelectronics, Fudan University, 220, Handan Road. Shanghai. China;

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• 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  nanoimprint; angle deposition; silicon nanowire sensor; gas detection;

  机译：纳米压印角沉积硅纳米线传感器气体检测;