Fabrication and characterization of silver deposited micro fabricated quartz arrays for surface enhanced Raman spectroscopy (SERS)

著录项

• 来源
  《Microelectronic Engineering》 |2011年第8期|p.1761-1763|共3页
• 作者

  Uwe Huebner; K. Weber; D. Cialla; H. Schneidewind; M. Zeisberger; H.-G. Meyer; J. Popp;

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• 作者单位

  Institute of Photonic Technology, Albert-Einstein-StrajSe 9. 07745 Jena, Germany;

  Institute of Physical Chemistry, Friedrich-Schiller-Universityjena, Helmholtzweg 4, 07743 Jena, Germany;

  Institute of Physical Chemistry, Friedrich-Schiller-Universityjena, Helmholtzweg 4, 07743 Jena, Germany;

  Institute of Photonic Technology, Albert-Einstein-StrajSe 9. 07745 Jena, Germany;

  Institute of Photonic Technology, Albert-Einstein-StrajSe 9. 07745 Jena, Germany;

  Institute of Photonic Technology, Albert-Einstein-StrajSe 9. 07745 Jena, Germany;

  Institute of Photonic Technology, Albert-Einstein-StrajSe 9. 07745 Jena, Germany Institute of Physical Chemistry, Friedrich-Schiller-Universityjena, Helmholtzweg 4, 07743 Jena, Germany;

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• 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  surface enhanced raman spectroscopy; plasmonic; e-beam lithography; dry-etching;

  机译：表面增强拉曼光谱;等离子;电子束光刻;干法刻蚀;