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首页> 外文期刊>Microelectronic Engineering >Direct patterning on side chain crystalline polymer by thermal nanoimprinting using mold without antisticking layer
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Direct patterning on side chain crystalline polymer by thermal nanoimprinting using mold without antisticking layer

机译：使用不带防粘层的模具通过热纳米压印在侧链结晶聚合物上直接构图

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摘要

Nanoimprint lithography (NIL) has been attracting attention of many industries because of its potential to produce various nanostructure applications through a simple, low-cost, and high-throughput process. The Intelimer is a side chain crystalline polymer. The crystallization phase transition of the side chain of the Intelimer is induced by increasing and decreasing temperature. The adhesive force of the Intelimer increases when the Intelimer is in the non-crystalline state. On the other hand, the adhesive force of the Intelimer decreases when the Intelimer is in the crystalline state. We focused on this characteristic of the Intelimer and placed a thermal nanoimprint onto the Intelimer by using a mold without an antisticking layer. As the result, the pattern was clearly imprinted on the Intelimer. In addition, the mold did not adhere to the Intelimer.
机译：纳米压印光刻技术（NIL）由于具有通过简单，低成本和高通量工艺生产各种纳米结构应用的潜力，因此吸引了许多行业的关注。 Intelimer是一种侧链结晶聚合物。升高和降低温度会引起Intelimer侧链的结晶相变。当Intelimer处于非晶态时，Intelimer的粘合力会增加。另一方面，当Intelimer处于结晶状态时，Intelimer的粘合力降低。我们专注于Intelimer的这一特性，并通过使用不带防粘层的模具在Intelimer上放置了一个热纳米压印。结果，该模式显然印在了Intelimer上。另外，该模具不符合Intelimer。

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  • 来源
    《Microelectronic Engineering》 |2011年第8期|p.2084-2087|共4页
  • 作者

    Makoto Okada; Shinichi Nakano; Koji Yamashita; Shinichiro Kawahara; Shinji Matsui;

  • 作者单位

    Univ. of Hyogo. Graduate School of Science. LASTI, 3-1-2 Koto. Kamigori. Ako, Hyogo 678-1205. Japan JST-CREST, Sanbancho. Chiyoda-ku. Tokyo 102-0075, Japan JSPS, 6 Ichibancho, Chiyoda-ku, Tokyo 102-8471, Japan Univ. of Hyogo, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori. Ako. Hyogo 678-1205. Japan;

    Nara Factory. NITTA Co.. 172 Ikezawacho. Yamatokohriyama-shi, Nara 639-1085, Japan;

    Nara Factory. NITTA Co.. 172 Ikezawacho. Yamatokohriyama-shi, Nara 639-1085, Japan;

    Nara Factory. NITTA Co.. 172 Ikezawacho. Yamatokohriyama-shi, Nara 639-1085, Japan;

    Univ. of Hyogo. Graduate School of Science. LASTI, 3-1-2 Koto. Kamigori. Ako, Hyogo 678-1205. Japan JST-CREST, Sanbancho. Chiyoda-ku. Tokyo 102-0075, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    nanoimprint lithography (nil); side chain crystalline polymer; crystallization phase transition; thermal nanoimprint;

    机译：纳米压印光刻法;侧链结晶聚合物;结晶相变;热纳米压印;

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