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Capacitive RF switches manufactured by the CMOS-MEMS technique

机译：通过CMOS-MEMS技术制造的电容式RF开关

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摘要

This work investigates the fabrication and characterization of a capacitive radio frequency (RF) switch using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique. The micromechanical RF switch had a high isolation and a low driving voltage. The structure of the micromechanical RF switch contains a coplanar waveguide (CPW), a suspended membrane, eight springs and four suspended inductors in series. The suspended inductors are used to enhance the characteristic of the RF switch. The finite element method software, CoventorWare, is employed to simulate the mechanical behaviors of the RF switch. After completion of the CMOS process, the RF switch requires a post-process to release the suspended structures. The post-process utilizes a dry etching and a wet etching to etch the sacrificial layer, and to obtain the suspended structures of the RF switch. Experimental results reveal that the RF switch has an insertion loss of 0.85 dB at 35 GHz and an isolation of 25 dB at 35 GHz. The driving voltage of the switch is about 11 V.
机译：这项工作研究了使用互补金属氧化物半导体（CMOS）-微机电系统（MEMS）技术的电容性射频（RF）开关的制造和特性。微机械RF开关具有高隔离度和低驱动电压。微机械RF开关的结构包含一个共面波导（CPW），一个悬浮膜，八个弹簧和四个串联的悬浮电感器。悬浮电感用于增强RF开关的特性。有限元方法软件CoventorWare用于模拟RF开关的机械性能。 CMOS工艺完成后，RF开关需要进行后处理才能释放出悬浮的结构。后处理利用干蚀刻和湿蚀刻来蚀刻牺牲层，并获得RF开关的悬浮结构。实验结果表明，RF开关在35 GHz时的插入损耗为0.85 dB，在35 GHz时的隔离度为25 dB。开关的驱动电压约为11V。

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  • 来源
    《Microelectronic Engineering》 |2011年第8期|p.2242-2246|共5页
  • 作者

    Ming-Zhi Yang; Ching-Liang Dai; Po-Jen Shih; Zung-You Tsai;

  • 作者单位

    Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan, ROC;

    Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan, ROC;

    Deportment of Civil and Environmental Engineering, National University of Kaohsiung, Kaohsiung, 811 Taiwan, ROC;

    Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan, ROC;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    rf switches; microactuators; cmos-mems;

    机译：射频开关;微执行器;CMOS-MEMS;

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