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首页> 外文期刊>Microelectronic Engineering >Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser
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Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser

机译：使用飞秒激光辐照的不锈钢模板进行热压花来制造抗反射结构

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摘要

Periodic nanostructures have played critical roles in key components for optical applications. Femtosecond laser-induced periodic surface structures (FLIPSS) in nano scale on many material surfaces have drawn much attention in recent years. However, the relatively low throughput of the direct inducing process limits its potential in regard to high volume manufacturing. In this study, fast replication of FLIPSS on Polycarbonate (PC) films by gas-assisted a hot embossing process is demonstrated. A selected surface area of a stainless steel thin plate is irradiated by femtosecond laser pulses to form a kind of periodic anti-reflective nanostructure with a period measuring 600-700 nm. The stainless plate was then used as a template for the hot embossing process. PC films with periodic nanostructures are then replicated quickly. Compared to the original PC film, at least up to 5% of the reflectivity of the fabricated PC films with nanostructures was reduced. It proves that the gas-assisted hot embossing could procure uniform transcription for anti-reflection PC film with stainless steel template that is irradiated by femtosecond laser pulses.
机译：周期性纳米结构在光学应用的关键组件中起着至关重要的作用。近年来，飞秒激光诱导的许多材料表面上的纳米级周期性表面结构（FLIPSS）备受关注。然而，直接诱导过程的相对较低的产量限制了其在大批量生产方面的潜力。在这项研究中，通过气体辅助的热压花工艺证明了FLIPSS在聚碳酸酯（PC）薄膜上的快速复制。飞秒激光脉冲辐照不锈钢薄板的选定表面积，以形成一种周期为600-700 nm的周期性抗反射纳米结构。然后将不锈钢板用作热压花工艺的模板。然后快速复制具有周期性纳米结构的PC膜。与原始的PC膜相比，所制备的具有纳米结构的PC膜的反射率至少降低了5％。证明了气体辅助的热压花可以使飞秒激光脉冲辐照的带有不锈钢模板的防反射PC膜具有均匀的转录效果。

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  • 来源
    《Microelectronic Engineering》 |2011年第9期|p.2908-2912|共5页
  • 作者

    Tsung-Fu Yao; Ping-Han Wu; Tzong-Ming Wu; Chung-Wei Cheng; Sen-Yeu Yang;

  • 作者单位

    Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan, ROC;

    ITRI South, Industrial Technology Research Institute, No. 8, Congyan Rd., Liujia Distriction, Tainan 734, Taiwan, ROC;

    ITRI South, Industrial Technology Research Institute, No. 8, Congyan Rd., Liujia Distriction, Tainan 734, Taiwan, ROC;

    ITRI South, Industrial Technology Research Institute, No. 8, Congyan Rd., Liujia Distriction, Tainan 734, Taiwan, ROC;

    Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan, ROC;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    nanostructure; femtosecond laser; polycarbonate; gas-assisted; hot embossing; anti-reflective;

    机译：纳米结构;飞秒激光;聚碳酸酯;气体辅助;热压花;抗反射;

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