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首页> 外文期刊>Microelectronic Engineering >Fabrication of 2D photonic crystal assisted Y_2O_3:Eu~(3+) thin-film phosphors by direct nano-imprinting
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Fabrication of 2D photonic crystal assisted Y_2O_3:Eu~(3+) thin-film phosphors by direct nano-imprinting

机译:直接纳米压印法制备二维光子晶体辅助Y_2O_3:Eu〜(3+)薄膜荧光粉

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摘要

The effect of a two-dimensional Y_2O_3:Eu~(3+) photonic crystal (PC) pattern on the extraction efficiency of photoluminescence from the underlying Y_2O_3:Eu~(3+) thin-film phosphor was investigated. The photonic crystal structure was fabricated using a direct nano-imprint process with a Pechini-type Y_2O_3:Eu~(3+) sol as the nano-imprint resin and a patterned polydimethylsiloxane (PDMS) stamp as the mold. The elevated pressure and temperature of the nano-imprinting process converts the Y_2O_3:Eu~(3+) sol into a Y_2O_3:Eu~(3+) gel resulting in high definition transfer of the 2D patterns of the master template into the gel on top of the Y_2O_3:Eu~(3+) thin-film phosphor layer. The extraction efficiency of the 2D Y_2O_3:Eu~(3+) gel PC-assisted Y_2O_3:Eu~(3+) thin-film phosphor was approximately 3.7 times higher than a non-PC Y_2O_3:Eu~(3+) gel coated Y_2O_3:Eu~(3+) thin-film phosphor.
机译:研究了二维Y_2O_3:Eu〜(3+)光子晶体(PC)图案对从下面的Y_2O_3:Eu〜(3+)薄膜荧光粉提取光致发光效率的影响。使用直接的纳米压印工艺,以Pechini型Y_2O_3:Eu〜(3+)溶胶作为纳米压印树脂,并使用图案化的聚二甲基硅氧烷(PDMS)压模作为模具,制造了光子晶体结构。纳米压印过程的升高的压力和温度将Y_2O_3:Eu〜(3+)溶胶转化为Y_2O_3:Eu〜(3+)凝胶,从而导致主模板的2D模式高清转移到凝胶上。 Y_2O_3:Eu〜(3+)薄膜荧光粉层的顶部。 PC辅助的Y_2O_3:Eu〜(3+)薄膜荧光粉的2D Y_2O_3:Eu〜(3+)凝胶的萃取效率比非PC Y_2O_3:Eu〜(3+)凝胶涂层的萃取效率高约3.7倍Y_2O_3:Eu〜(3+)薄膜荧光粉。

著录项

  • 来源
    《Microelectronic Engineering》 |2011年第9期|p.2930-2933|共4页
  • 作者单位

    Institute ofNano Science and Technology, Hanyang University, Seoul 133-791, Republic of Korea;

    Department of Materials Science and Engineering, Hanyang University, Seoul 133-791, Republic of Korea;

    Department of Materials Science and Engineering, Hanyang University, Seoul 133-791, Republic of Korea;

    Department of Materials Science and Engineering, Korea University, Seoul 136-713, Republic of Korea;

    Department of Chemistry, Kookmin University, Seoul 136-702, Republic of Korea;

    Department of Materials Science and Engineering, Hanyang University, Seoul 133-791, Republic of Korea;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    nano-imprint; pdms stamp; photonic crystal; thin-film phosphor; sol-gel;

    机译:纳米压印;PDMS印章;光子晶体;薄膜荧光粉;溶胶-凝胶;

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