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首页> 外文期刊>Microelectronic Engineering >Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection
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Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection

机译：仿生砷化镓亚波长光栅结构的宽带和与角度无关的减反射工艺

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摘要

We combine interferometric lithography and inductively coupled plasma etching to fabricate GaAs subwavelength grating (SWG) which mimics the moth eye structures. Through the modification of morphology parameters, including profile, height and packing fraction, tapered, high-aspect-ratio and closely-packed GaAs SWGs are obtained. The measurement of spectral reflectance of the fabricated SWGs shows that reflection has been dramatically reduced compared to the polished GaAs surface. Particularly, the optimized SWG structures exhibit an average reflection below 5% in the wavelengths ranging from 350 to 900 nm. Furthermore, the angular-independent property is demonstrated by measuring the reflectance versus varying angles of incidence at 532 and 632.8 nm wavelengths.
机译：我们将干涉光刻与感应耦合等离子体蚀刻相结合，以制造模仿蛾眼结构的GaAs亚波长光栅（SWG）。通过修改形貌参数，包括轮廓，高度和堆积分数，可以获得锥形，高长径比和紧密堆积的GaAs SWG。所制造的SWG的光谱反射率的测量结果表明，与抛光的GaAs表面相比，反射率已大大降低。特别是，优化的SWG结构在350至900 nm的波长范围内表现出低于5％的平均反射率。此外，通过在532和632.8 nm波长下测量反射率与入射角的变化关系，证明了角度无关的特性。

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  • 来源
    《Microelectronic Engineering》 |2011年第9期|p.2889-2893|共5页
  • 作者

    Xi Chen; Zhong-Chao Fan; Yun Xu; Guo-Feng Song; Liang-Hui Chen;

  • 作者单位

    Nano-optoelectronics Lab, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;

    Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;

    Nano-optoelectronics Lab, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;

    Nano-optoelectronics Lab, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;

    Nano-optoelectronics Lab, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    subwavelength gratings; broadband antireflection; interferometric lithography; moth eye;

    机译：亚波长光栅宽带减反射干涉光刻蛾眼;

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