A comparative study of depth profiling of interface states using charge pumping and low frequency noise measurement in SiO_2/HfO_2 gate stack nMOSFETs

著录项

• 来源
  《Microelectronic Engineering》 |2011年第12期|p.3411-3414|共4页
• 作者

  Kyong Taek Lee; Chang Yong Kang; Hyun-Sik Choi; Seung-Ho Hong; Gil-Bok Choi; Jae Chul Kirn; Seung-Hyun Song; Rock-Hyun Baek; Min-Sang Park; Hyun Chul Sagong; Byoung Hun Lee; Gennadi Bersuker; Hsing-Huang Tseng; Raj Jammy; Yoon-Ha Jeong;

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• 作者单位

  Dept. of Electronic and Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Cyeongbuk 790-784, Republic of Korea;

  SEMATECH. 2706 Montopolis Drive, Austin, IX 78741, USA;

  Dept. of Electronic and Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Cyeongbuk 790-784, Republic of Korea;

  Dept. of Electronic and Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Cyeongbuk 790-784, Republic of Korea;

  Dept. of Electronic and Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Cyeongbuk 790-784, Republic of Korea;

  Dept. of Electronic and Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Cyeongbuk 790-784, Republic of Korea;

  Dept. of Electronic and Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Cyeongbuk 790-784, Republic of Korea;

  Dept. of Electronic and Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Cyeongbuk 790-784, Republic of Korea;

  Dept. of Electronic and Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Cyeongbuk 790-784, Republic of Korea;

  Dept. of Electronic and Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Cyeongbuk 790-784, Republic of Korea;

  SEMATECH. 2706 Montopolis Drive, Austin, IX 78741, USA;

  Dept. of Electronic and Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Cyeongbuk 790-784, Republic of Korea;

  SEMATECH. 2706 Montopolis Drive, Austin, IX 78741, USA;

  SEMATECH. 2706 Montopolis Drive, Austin, IX 78741, USA;

  Dept. of Electronic and Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang, Cyeongbuk 790-784, Republic of Korea;

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• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  low frequency noise; charge pumping; HfO_2/SiO_2 gate stack; HCI; PBTI;

  机译：低频噪声电荷泵;HfO_2 / SiO_2栅叠层;人机交互PBTI;