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Local oxidation of titanium films by non-contact atomic force microscopy

机译：非接触原子力显微镜观察钛膜的局部氧化

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摘要

Characteristics of local nanolithography on oxidative titanium dots and wires were studied using an amplitude modulation atomic force microscopy in the non-contact mode. Nanolithographic experiments were conducted to investigate the influence that different experimental parameters had on the height, the width, the growth rate, the morphology, and the composition of the nanostructures using Auger electron spectroscopy. The results indicate that anodization time, applied voltage, and tip-sample distance are proportional to the heights and widths of the dots. When the tip-sample distance was too close during continued anodization, concave dots appeared because the oxide that enclosed the tip. Carbon nano-tube probe fabricated dots are also presented and compared.
机译：使用振幅调制原子力显微镜在非接触模式下研究了在氧化钛点和线上局部纳米光刻的特性。进行了纳米光刻实验，以利用俄歇电子能谱研究不同的实验参数对纳米结构的高度，宽度，生长速率，形貌和组成的影响。结果表明，阳极氧化时间，施加电压和针尖采样距离与点的高度和宽度成比例。如果在继续阳极氧化过程中吸头样品距离太近，则会出现凹点，因为包围吸头的氧化物。还介绍并比较了碳纳米管探针制造的点。

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