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首页> 外文期刊>Microelectronic Engineering >Patterning a nanowell sensor biochip for specific and rapid detection of bacteria
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Patterning a nanowell sensor biochip for specific and rapid detection of bacteria

机译：图案化纳米孔传感器生物芯片以进行细菌的特异性和快速检测

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This paper presents the fabrication process of a SEPTIC (SEnsing of Phage-Triggered Ion Cascades) chip, consisting of two Ti contact pads and a 150 nm wide Ti nanowell device on LiNbO_3 substrate. The patterning was fulfilled by combining electron beam lithography, contact photolithography and reactive ion etching. When connected to an external preamplifier and spectrum analyzer, the nanowell can probe nano-scale electric field fluctuations. The use of this chip as nano-scale electric field probe was demonstrated by detecting the transitory ion efflux from bacteria being infected by phage. Our experiment showed that the electric field noise follows l/f~2 power spectrum when the bacteria are sensitive to the phage, whereas l/f noise corresponds to bacteria resistant to the phage. The use of fluctuation-enhanced sensing can provide sensitivity orders of magnitude higher than conventional sensing that detects changes only in the mean value of electrical signals.
机译：本文介绍了一种SEPTIC（噬菌体离子级联检测）芯片的制造工艺，该芯片由两个Ti接触垫和一个在LiNbO_3衬底上的150 nm宽的Ti纳米孔器件组成。通过结合电子束光刻，接触光刻和反应性离子蚀刻来完成图案化。当连接到外部前置放大器和频谱分析仪时，纳米孔可以探测纳米级电场波动。通过检测被噬菌体感染的细菌的瞬时离子流出，证明了该芯片作为纳米级电场探针的用途。我们的实验表明，当细菌对噬菌体敏感时，电场噪声遵循l / f〜2功率谱，而l / f噪声对应于对噬菌体具有抗性的细菌。与仅检测电信号平均值变化的常规传感相比，使用波动增强的传感可以提供高几个数量级的灵敏度。

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