Fabrication of various curved relief structures through concave surface forming and soft replica molding

Teng-Kai Shih; Chia-Fu Chen; Jeng-Rong Ho; Fang-Tzu Chuang

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Fabrication of various curved relief structures through concave surface forming and soft replica molding

机译：通过凹面成型和软复制成型来制造各种曲面浮雕结构

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摘要

In this case, our groups presented various optical structures through the presented method, involving concave surface forming and soft replica molding. The method of concave surface forming is mainly for the fabrication of concave surface. The method of soft replica molding is mainly for the fabrication of replica. Concave and convex relief structures, including circular curved relief structures, convex relief structures with platform structures on the top, refractive beam-shaping elements, these structures with dual curvatures and asymmetric structures, can be easily made through the presented method, respectively. All processes of manufacture are in several simple steps without multistep optical lithography and complex masks.

机译：在这种情况下，我们的小组通过提出的方法提出了各种光学结构，包括凹面成型和软复制成型。凹面形成方法主要用于凹面的制造。软复制品模制的方法主要用于复制品的制造。凹凸的凹凸结构，包括圆形的弯曲凹凸结构，在顶部具有平台结构的凹凸结构，折射光束整形元件，具有双曲率的结构和不对称结构，可以分别通过所提出的方法容易地制造。所有制造过程均采用几个简单的步骤，而无需多步骤光刻和复杂的掩模。

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来源
《Microelectronic Engineering》 |2006年第3期|p.471-475|共5页
作者
Teng-Kai Shih; Chia-Fu Chen; Jeng-Rong Ho; Fang-Tzu Chuang;
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作者单位

Department of Materials Science and Engineering, National Chiao Tung University, 1001 Ta Hsueh Road, Hsinchu, Taiwan 300, ROC;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
关键词
soft replica molding; concave surface forming; curved relief structures;

机译：软复制品成型;凹面成型;弯曲浮雕结构;

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Fabrication of various curved relief structures through concave surface forming and soft replica molding

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