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首页> 外文期刊>Microelectronics journal >Ammonia optical gas sensing based on graphene-covered silicon microring resonators: A design space exploration
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Ammonia optical gas sensing based on graphene-covered silicon microring resonators: A design space exploration

机译：基于石墨烯覆盖的硅微管谐振器的氨气气传感：设计空间探索

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This paper discusses the design space exploration for an ammonia optical gas sensor based on a silicon microring resonator that is covered by graphene. A comparative analysis of the transmittance sensitivity of its fundamental quasi-TE and quasi-TM modes is presented. Results show that a large fraction of the fundamental quasi-TM mode's electrical energy is propagating outside the waveguide, which makes this geometry more sensitive to ammonia induced changes in Fermi energy of graphene. The overall transmittance intensity difference, for the fundamental quasi-TE mode is less than 1 dB, independent of ring radius, when the ammonia gas concentration is varied from 0.5 to 1000 ppm. For the fundamental quasi-TM mode, results show that a ring radius similar to 8.4 mu m can provide critical coupling condition and lead to 20 dB modulation of transmittance intensity when the ammonia gas concentration is varied from 0.5 to 1000 ppm. Overall, proper selection of mode excitation as well as ring geometry is essential to attain practical sensitivity.
机译：本文讨论了基于石墨烯覆盖的硅微管谐振器的氨光气体传感器的设计空间探索。提出了对其基本准TE和准TM模式的透射率灵敏度的对比分析。结果表明，大部分基本的准TM模式的电能在波导之外传播，这使得这种几何形状对石墨烯的费米能量变化更敏感。对于基本的准TE模式，整体透射率强度差异小于1dB，与环半径无关，当氨气浓度变化0.5至1000ppm时。对于基本的准tm模式，结果表明，环半径类似于8.4μm，可以提供关键耦合条件并导致氨气浓度从0.5〜1000ppm变化时的透射率强度的20dB调制。总体而言，正确选择模式激励以及环形几何形状对于实现实际敏感性至关重要。

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