Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror

著录项

• 来源
  《Microelectronics & Reliability》 |2012年第10期|p.2120-2122|共3页
• 作者

  Y. Lu; E. Ramsay; C.R. Stockbridge; A. Yurt; F.H. Koeklue; T.G. Bifano; M.S. UEnlue; B.B. Goldberg;

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• 作者单位

  Department of Mechanical Engineering, Boston University, Boston, MA, USA;

  Department of Physics, Boston University, Boston, MA USA;

  Department of Mechanical Engineering, Boston University, Boston, MA, USA;

  Department of Materials Science and Engineering, Boston, University, Boston, MA, USA;

  Department of Electrical and Computer Engineering, Boston, University, Boston, MA, USA;

  Department of Mechanical Engineering, Boston University, Boston, MA, USA,Centers for Nanoscience and Photonics, Boston University, Boston, MA USA;

  Department of Electrical and Computer Engineering, Boston, University, Boston, MA, USA,Centers for Nanoscience and Photonics, Boston University, Boston, MA USA;

  Department of Physics, Boston University, Boston, MA USA,Centers for Nanoscience and Photonics, Boston University, Boston, MA USA;

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• 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
• 原文格式 PDF
• 正文语种 eng
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