Thermal laser stimulation and NB-OBIC techniques applied to ESD defect localization

T. Beauchene; D. Lewis; F. Beaudoin; V. Pouget; R. Desplats; P. Fouillat; P. Perdu; M. Bafleur; D. Tremouilles

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Thermal laser stimulation and NB-OBIC techniques applied to ESD defect localization

机译：热激光刺激和NB-OBIC技术应用于ESD缺陷定位

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This paper presents an experimental comparison of laser beam based techniques applied to a case study concerning ESD defect location. Thermal laser stimulation and non-biased optical beam induced current techniques are evaluated and discussed. Experimental results demonstrate the advantages and weak points of the two approaches.

机译：本文介绍了基于激光束技术的实验比较，该技术应用于涉及ESD缺陷位置的案例研究。评估和讨论了热激光刺激和无偏光束感应电流技术。实验结果证明了两种方法的优缺点。

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来源
《Microelectronics & Reliability》 |2003年第3期|p.439-444|共6页
作者
T. Beauchene; D. Lewis; F. Beaudoin; V. Pouget; R. Desplats; P. Fouillat; P. Perdu; M. Bafleur; D. Tremouilles;
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作者单位

IXL Laboratoire, Universite of Bordeaux 1, 33405 Talence, France;

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类一般性问题;
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机译：β-Ga_2O_3脉冲激光沉积薄膜和Czochralski生长的散装单晶的深层缺陷通过热刺激技术
3. Application of various optical techniques for ESD defect localization [J] . F. Essely, F. Darracq, V. Pouget, Microelectronics & Reliability . 2006,第9a11期

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4. ESD defect localisation using photovoltaic laser stimulation techniques: optimization and interpretation [C] . Beauchene, T., Lewis, . 2003

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5. The development of scalable pump techniques for GG IAG fiber lasers and passive athermalization techniques for solid state lasers. [D] . Hageman, William B. 2010

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6. Subsurface Defect Localization by Structured Heating Using Laser Projected Photothermal Thermography [O] . Erik Thiel, Mathias Ziegler 2017

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8. Analysis of the Thermally Stimulated Capacitor-Discharge Method for Characterizing Localized States in Amorphous Semiconductors. [R] . Agarwal, S. C. 1974

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Thermal laser stimulation and NB-OBIC techniques applied to ESD defect localization

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