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Dynamic simulation of a contact-enhanced MEMS inertial switch in Simulink®

机译：Simulink ®中接触增强型MEMS惯性开关的动态仿真

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A novel contact-enhanced design of MEMS (micro-electro-mechanical system) inertial switch was proposed and modeled in Simulink®. The contact effect is improved by an easily realized modification on the traditional design, i.e. introducing a movable contact point between the movable electrode (proof mass) and the stationary electrode, therefore forming a dual mass-spring system. The focus of this paper is limited to a vertically driven unidirectional one for the purposes of demonstration, but this design concept and Simulink® model is universal for various kinds of inertial micro-switches. The dynamic simulation confirmed the contact-enhancing mechanism, showing that the switch-on time can be prolonged for the dynamic shock acceleration and the bouncing effect can be reduced for the quasi-static acceleration. The threshold acceleration of the inertial switch is determined by the proof mass-spring system’s natural frequency. Since the inertial switches were fabricated by the multilayer electroplating technology, the proof mass thickness were assigned two values, 100 and 50 μm, in order to get threshold levels of 56 and 133 g respectively for the dynamic acceleration of half-sine wave with 1 ms duration. Other factors that influence the dynamic response, such as the squeeze film damping and the contact point-spring system’s natural frequency were also discussed. The fabricated devices were characterized by the drop hammer experiment, and the results were in agreement with the simulation predictions. The switch-on time was prolonged to over 50 μs from the traditional design’s 10 μs, and could reach as long as 120 μs. Finally, alternative device configurations of the contact-enhancing mechanism were presented, including a laterally driven bidirectional inertial switch and a multidirectional one.
机译：提出了一种新颖的MEMS（微机电系统）惯性开关接触增强设计，并在Simulink ®中进行了建模。通过对传统设计的容易实现的改进，即在可移动电极（检测质量）和固定电极之间引入可移动接触点，从而形成双质量弹簧系统，从而改善了接触效果。本文仅出于演示目的而限于垂直驱动的单向开关，但是这种设计概念和Simulink ®模型对于各种惯性微动开关都是通用的。动态仿真证实了接触增强机制，表明动态冲击加速度可以延长接通时间，准静态加速度可以减小弹跳效果。惯性开关的阈值加速度取决于质量弹簧系统的固有频率。由于惯性开关是通过多层电镀技术制造的，因此将标准质量厚度指定为两个值，分别为100和50μm，以便在1 ms的半正弦波动态加速度下分别获得56 g和133 g的阈值水平持续时间。还讨论了影响动态响应的其他因素，例如挤压膜的阻尼和接触点弹簧系统的固有频率。通过落锤实验对所制造的器件进行了表征，结果与仿真预测吻合。接通时间从传统设计的10μs延长到50μs以上，并且可能长达120μs。最后，介绍了接触增强机构的替代设备配置，包括横向驱动的双向惯性开关和多向开关。

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