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Slip model for the ultra-thin gas-lubricated slider bearings of an electrostatic micromotor in MEMS

机译：MEMS静电微电机超薄气润滑滑块轴承的滑移模型

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摘要

A new slip model derived by molecular dynamics has been used to investigate the ultra-thin gas-lubricated slider bearings beneath the three bushings of an electrostatic micromotor in micro-electro-mechanical systems (MEMS). Modified Reynolds equation is proposed based on the modified slip model. Analytical solutions for flow rate, pressure distribution, load carrying capacity and streamwise location using the modified Reynolds equation are obtained and compared with the results gained from those in the literature. It demonstrates that the new second-order slip model is of greater accuracy than that predicted by the first-order, second-order slip models and MMGL model and produces a good approximation to variable hard sphere (VHS) and variable soft sphere (VSS) models, which agree well with the solution obtained from the linearized Boltzmann equation. It is indicated that the slip effect reduces the pressure distribution and load carrying capacity, and shifts the streamwise location of the load carrying capacity, which should not be ignored to study the step-shaped slider bearings in micromotors for MEMS devices.
机译：通过分子动力学得出的新滑移模型已用于研究微机电系统（MEMS）中静电微电机的三个轴套下方的超薄气体润滑滑块轴承。基于改进的滑移模型，提出了改进的雷诺方程。使用修正的雷诺方程获得了流速，压力分布，承载能力和流向位置的解析解，并与文献中的结果进行了比较。结果表明，新的二阶滑移模型比一阶，二阶滑移模型和MMGL模型预测的精度更高，并且可以很好地逼近可变硬球（VHS）和可变软球（VSS）这些模型与从线性化的玻耳兹曼方程获得的解非常吻合。结果表明，滑移效应减小了压力分布和承载能力，并改变了承载能力的沿流方向，这对于研究用于MEMS器件的微电机中的阶梯形滑动轴承是不容忽视的。

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  • 来源
    《Microsystem Technologies》 |2009年第6期|953-961|共9页
  • 作者

    Wen-Ming Zhang; Guang Meng; Jian-Bin Zhou; Jie-Yu Chen;

  • 作者单位

    State Key Laboratory of Mechanical System and Vibration School of Mechanical Engineering Shanghai Jiao Tong University 800 Dongchuan Road Shanghai 200240 People’s Republic of China;

    State Key Laboratory of Mechanical System and Vibration School of Mechanical Engineering Shanghai Jiao Tong University 800 Dongchuan Road Shanghai 200240 People’s Republic of China;

    State Key Laboratory of Mechanical System and Vibration School of Mechanical Engineering Shanghai Jiao Tong University 800 Dongchuan Road Shanghai 200240 People’s Republic of China;

    State Key Laboratory of Mechanical System and Vibration School of Mechanical Engineering Shanghai Jiao Tong University 800 Dongchuan Road Shanghai 200240 People’s Republic of China;

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