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首页> 外文期刊>Microwaves, Antennas & Propagation, IET >Ka-band RF MEMS capacitive switch with low loss, high isolation, long-term reliability and high power handling based on GaAs MMIC technology
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Ka-band RF MEMS capacitive switch with low loss, high isolation, long-term reliability and high power handling based on GaAs MMIC technology

机译：基于GaAs MMIC技术的低损耗，高隔离度，长期可靠性和高功率处理能力的Ka波段RF MEMS电容式开关

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摘要

This study presents a Ka-band radio frequency (RF) micro electro mechanical systems (MEMS) capacitive switch with low loss, high isolation, long-term reliability and high power handling based on GaAs microwave monolithic integrated circuit (MMIC) technology. In this design, a T-matching structure is employed to realise impendence matching at ‘up-state’ by modifying the dimensions of centre signal line. Thus, the reflection loss and insertion loss are improved effectively. Measurement results show that in ‘up-state’ position, the input reflection coefficient (S11) is less than −20.4 dB with the forward transmission coefficient (S21) of better than −0.27 dB at Ka-band (27–40 GHz). At ‘down-state’, the switch is designed in a state of self-resonance to obtain high isolation. The measured isolation is better than 20 dB over Ka-band and can reach 35 dB at its self-resonant frequency of 35 GHz. The measured actuation voltage is about 36 V. The measured lifetime is at least 5.76 × 107 cycles. The measured power handling capability can reach up to 39 dBm. The proposed compact RF MEMS capacitive switch possesses excellent performances in terms of low insertion loss, high isolation, long lifetime and high power handling capability.
机译：这项研究提出了一种基于GaAs微波单片集成电路（MMIC）技术的，具有低损耗，高隔离度，长期可靠性和高功率处理能力的Ka波段射频（RF）微机电系统（MEMS）电容开关。在该设计中，采用T匹配结构，通过修改中心信号线的尺寸来实现“上状态”下的阻抗匹配。因此，有效地改善了反射损耗和插入损耗。测量结果表明，在“向上”位置，在Ka频段（27-4027GHz）处，输入反射系数（S11）小于-20.4 withdB，而前向传输系数（S21）优于-0.27 dB。在“关闭状态”下，开关被设计为具有自谐振状态，以实现高隔离度。在Ka频段上测得的隔离度优于20µdB，并且在35 GHz的自谐振频率下可以达到35µdB。测得的启动电压约为36 V，测得的寿命至少为5.76×107个周期。测得的功率处理能力可以达到39 dBm。所提出的紧凑型RF MEMS电容开关在低插入损耗，高隔离度，长寿命和高功率处理能力方面具有出色的性能。

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