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Developing a Wearable System with MEMS Accelerometer for Real-Time Activity Monitoring

机译:使用MEMS加速度计开发可穿戴系统以进行实时活动监控

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摘要

This paper present design, fabrication and characterization of a miniaturized single crystal cantilever type 1-axis MEMS accelerometer with piezoresistive sensing elements utilizing bulk micromachining techniques. It has overall dimensions of 950umx850umx450um, length width and thickness, respectively. This accelerometer is being introduced for a wearable sensing system for real-time activity monitoring. Possible cases of experiments have been conducted to evaluate our system and algorithm.
机译:本文介绍了利用体微加工技术的具有压阻传感元件的小型单晶悬臂式1轴MEMS加速度计的设计,制造和特性。它的整体尺寸为950umx850umx450um,长度分别为宽度和厚度。该加速度计被引入可穿戴式传感系统,用于实时活动监控。已经进行了可能的实验案例,以评估我们的系统和算法。

著录项

  • 来源
    《電気学会論文誌》 |2009年第5期|142-147|共6页
  • 作者单位

    Department of Micro Systems Technology, Ritsumeikan University 1-1-1, Noji-Higashi, Kusatsu, Shiga 525-8577;

    Research Organization for Science and Engineering, Ritsumeikan University 1-1-1, Noji-Higashi, Kusatsu, Shiga 525-8577;

    Ritsumeikan-Global Innovation Research Organization, Ritsumeikan University 1-1-1, Noji-Higashi, Kusatsu, Shiga 525-8577;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    MEMS accelerometer; piezoresistive; micromachining;

    机译:MEMS加速度计;压阻式微加工;

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