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首页> 外文期刊>NanoBioscience, IEEE Transactions on >Towards Microscale Flight: Fabrication, Stability Analysis, and Initial Flight Experiments for 300 $mu {rm m} times ,$ 300 $mu {rm m} times ,$1.5 $mu {rm m}$ Sized Untethered MEMS Microfliers
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Towards Microscale Flight: Fabrication, Stability Analysis, and Initial Flight Experiments for 300 $mu {rm m} times ,$ 300 $mu {rm m} times ,$1.5 $mu {rm m}$ Sized Untethered MEMS Microfliers

机译：迈向微观飞行：300次 $ mu {rm m}次，$ 300 <的制造，稳定性分析和初始飞行实验公式Formulatype =“ inline”> $ mu {rm m}次，$ 1.5 $ mu {rm m} $ 大小不限的MEMS微型滤波器

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摘要

This paper presents modeling, designs, and initial experimental results demonstrating successful untethered microscale flight of stress-engineered microscale structures propelled by thermal forces. These MEMS Microfliers are 300 300 1.5 in size and are fabricated out of polycrystalline silicon using a surface micromachining process. A concave chassis, created using a novel in-situ masked post-release stress-engineering process, promotes static in-flight stability. High-speed optical micrography was used to capture image sequences of their flight, and this imagery was subsequently used to analyze their mid-flight performance. Our analysis, combined with finite element modeling (FEM) confirms stable flight of the microfliers within the thermal gradient above the heaters. This novel microscale flying platform presented in this paper may pave the way for new types of aerial microrobots.
机译：本文介绍了建模，设计和初步的实验结果，展示了由热力推动的应力工程化微尺度结构的成功的不受限制的微尺度飞行。这些MEMS微型滤波器尺寸为300 300 1.5，并使用表面微加工工艺由多晶硅制成。使用新颖的原位掩盖释放后应力工程工艺制成的凹形底盘可提高飞行中的静态稳定性。高速光学显微术用于捕获其飞行的图像序列，随后将该图像用于分析其飞行中的性能。我们的分析与有限元建模（FEM）相结合，证实了微加热器在加热器上方的热梯度内的稳定飞行。本文介绍的这种新颖的微型飞行平台可能为新型空中微型机器人铺平道路。

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