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首页> 外文期刊>Nuclear Instruments & Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment >Silicon photomultiplier detector with multipurpose in-pixel electronics in standard CMOS technology
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Silicon photomultiplier detector with multipurpose in-pixel electronics in standard CMOS technology

机译:硅光电倍增管探测器,采用标准CMOS技术的多功能像素电子器件

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摘要

This paper presents a monolithic avalanche diode array designed in a commercial AMS 350 nm high-voltage CMOS (HV-CMOS) process. This monolithic detector comprises a single photon avalanche diode (SPAD), active quenching circuit and readout electronics. The SPAD consists of a p+ diffusion-well junction surrounded by a shallow p-well acting as a guard ring to prevent edge breakdown. The monolithic detector has a matrix of 20 x 15 pixels. The size of one SPAD pixel is 38 x 92 mu m(2). One pixel defined as SPAD and readout electronics has a total size of 115 x 111 mu m(2) with a fill factor = 24.3% and a chip size of about 2.8 x 2.6 mm(2).
机译:本文提出了一种单片雪崩二极管阵列,该阵列是在商业AMS 350 nm高压CMOS(HV-CMOS)工艺中设计的。该单片检测器包括一个光子雪崩二极管(SPAD),有源猝灭电路和读出电子器件。 SPAD由一个p +扩散/ n阱结组成,周围是浅p阱,用作保护环以防止边缘击穿。单片检测器具有20 x 15像素的矩阵。一个SPAD像素的大小为38 x 92微米(2)。定义为SPAD和读出电子设备的一个像素的总尺寸为115 x 111μm(2),填充系数= 24.3%,芯片尺寸约为2.8 x 2.6 mm(2)。

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