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首页> 外文期刊>Nuclear Instruments & Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment >Mechanical design of a single-axis monolithic accelerometer for advanced seismic attenuation systems
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Mechanical design of a single-axis monolithic accelerometer for advanced seismic attenuation systems

机译：用于高级地震衰减系统的单轴单片加速度计的机械设计

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摘要

The design and mechanics for a new very-low noise low frequency horizontal accelerometer is presented. The sensor has been designed to be integrated in an advanced seismic isolation system for interferometric gravitational wave detectors. The motion of a small monolithic folded-pendulum (FP) is monitored by a high resolution capacitance displacement sensor; a feedback force actuator keeps the mass at the equilibrium position. The feedback signal is proportional to the ground acceleration in the frequency range 0-150 Hz. The very high mechanical quality factor, Q approx= 3000 at a resonant frequency of 0.5 Hz, reduces the Brownian motion of the proof mass of the accelerometer below the resolution of the displacement sensor. This scheme enables the accelerometer to detect the inertial displacement of a platform with a root-mean-square noise less than 1 nm, integrated over the frequency band from 0.01 to 150 Hz. The FP geometry, combined with the monolithic design, allows the accelerometer to be extremely directional. A vertical-horizontal coupling ranging better than 10~(-3) has been achieved. A detailed account of the design and construction of the accelerometer is reported here. The instrument is fully ultra-high vacuum compatible and has been tested and approved for integration in seismic attenuation system of Japanese TAMA 300 gravitational wave detector. The monolithic design also makes the accelerometer suitable for cryogenic operation.
机译：介绍了一种新型超低噪声低频水平加速度计的设计和原理。该传感器已设计为集成在先进的地震隔离系统中，用于干涉重力波检测器。小型整体式摆锤（FP）的运动由高分辨率电容位移传感器监控；反馈力致动器将质量保持在平衡位置。反馈信号与0-150 Hz频率范围内的地面加速度成比例。在0.5 Hz的谐振频率下，非常高的机械品质因数Qrox = 3000，可将加速度计的标准质量的布朗运动降低到位移传感器的分辨率以下。该方案使加速度计能够检测均方根噪声小于1 nm的平台的惯性位移，该噪声在0.01至150 Hz的频带上积分。 FP几何形状与单片设计相结合，使加速度计具有极高的方向性。实现了优于10〜（-3）的垂直水平耦合。此处报告了加速度计的设计和构造的详细说明。该仪器完全兼容超高真空，并已通过测试并批准用于日本TAMA 300重力波探测器的地震衰减系统。单片设计还使加速度计适合低温操作。

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