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Design of a compact focusing lens system with short acceleration tube at 300 kV

机译:具有短加速管的300 kV紧凑型聚焦透镜系统的设计

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A compact focusing lens system with high demagnification over 1500 was designed to form an ion nano-beam with 346 keV energy by adding a short distance acceleration tube for beam acceleration and focusing downstream of the existing double acceleration lens system. The demagnification, focusing points and aberrations of the acceleration tube were studied using beam trajectory calculation. The acceleration tube was designed to have a length of 140 mm and a demagnification of 2 at its acceleration tube voltage of 300 kV, which resulted in a new compact focusing lens system with a total length of about 640 mm. In addition, the maximum voltage and electric-field of the acceleration tube were confirmed experimentally on the built device to be 300 kV and 30 kV/cm, respectively. The final beam size formed by the system was estimated to be 130 nm in diameter using the design parameters. The result suggests that an ion nanobeam of 346 keV can be formed by an apparatus having the reasonable length of 2 m, which permits us to develop a system for 1 MV by elongating its tube length.
机译:设计了一种紧凑型聚焦透镜系统,其放大倍数超过1500,设计成通过添加用于束加速的短距离加速管并在现有的双加速透镜系统的下游聚焦而形成具有346 keV能量的离子纳米束。利用光束轨迹计算研究了加速管的倍率,聚焦点和像差。加速管的长度设计为140 mm,在加速管电压为300 kV时的放大倍数为2,这导致了新的紧凑型聚焦透镜系统的总长度约为640 mm。另外,实验证明了在该装置上加速管的最大电压和电场分别为300 kV和30 kV / cm。使用设计参数,系统形成的最终光束尺寸估计为直径130 nm。结果表明,可以通过具有2 m合理长度的设备来形成346 keV的离子纳米束,这使我们能够通过延长其管长来开发1 MV的系统。

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