...
首页> 外文期刊>Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms >Studies of the composition, mechanical and electrical properties of N-doped carbon films prepared by DC-MFCAD
【24h】

Studies of the composition, mechanical and electrical properties of N-doped carbon films prepared by DC-MFCAD

机译:DC-MFCAD制备的N掺杂碳膜的组成,力学性能和电性能的研究

获取原文
获取原文并翻译 | 示例
           

摘要

N-doped carbon films were prepared on Si(100) and Ti-6Al-4V substrates using direct current magnetically filtered cathodic arc 1 deposition (DC-MFCAD) at room temperature for various different N_2 pressures. The structure and composition of the films were characterized by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). Ball-on-disk and microhardness tests were used to characterize the mechanical properties of the films, and Hall effect tests were employed to study the electrical properties.
机译:在室温下针对各种不同的N_2压力,使用直流磁过滤阴极电弧1沉积(DC-MFCAD),在Si(100)和Ti-6Al-4V衬底上制备了N掺杂碳膜。膜的结构和组成通过拉曼光谱和X射线光电子能谱(XPS)表征。圆盘球和显微硬度测试用于表征薄膜的机械性能,霍尔效应测试用于研究电性能。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号