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首页> 外文期刊>Nuclear Instruments & Methods in Physics Research. B, Beam Interactions with Materials and Atoms >Depth selective XANES study of swift heavy ion irradiation effects in metal/Si systems
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Depth selective XANES study of swift heavy ion irradiation effects in metal/Si systems

机译：深度选择性XANES研究金属/硅系统中快速重离子辐照效应

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摘要

Swift heavy ion induced intermixing of thin metallic layers of Ti, Fe and W with Si has been studied. A single specimen containing 3.0 nm thick layers of the three metals at different depths in Si, ensures a more reliable comparison of the mixing efficiencies of the three systems. X-ray reflectivity and X-ray standing wave analysis has been used to obtain the concentration profile of the three metals before and after irradiation with 100 MeV Au ions. While Ti and Fe exhibit considerable mixing with Si after an irradiation fluence of 1 x 10~(13) ions/cm~2, W profile is only slightly broadened. XANES measurements under X-ray standing wave conditions have been able to differentiate between the structure of the center of a layer from that of the interfacial region. It is found that irradiation results in only a further disordering of the central as well as interfacial regions of the W layer. In contrast, the Fe layer gets completely mixed with Si and forms an amorphous silicide.
机译：研究了快速重离子诱导的Ti，Fe和W薄金属层与Si的混合。一个单一的样品在Si中不同深度处包含三种金属的3.0 nm厚的层，可确保对三种系统的混合效率进行更可靠的比较。 X射线反射率和X射线驻波分析已用于获得100 MeV Au离子辐照前后三种金属的浓度曲线。 Ti和Fe在辐照量为1 x 10〜（13）离子/ cm〜2后显示出与Si的大量混合，而W分布仅略微变宽。在X射线驻波条件下的XANES测量已经能够区分层中心的结构和界面区域的结构。发现辐照仅导致W层的中心区域和界面区域的进一步混乱。相反，Fe层与Si完全混合并形成非晶硅化物。

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