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Annealing process and mechanism of glass based VO_2 film from V oxidation in pure oxygen atmosphere

机译：纯氧气氛下V氧化对玻璃基VO_2薄膜的退火工艺及机理

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摘要

Vanadium oxidation method is a promising approach for industrial production of VO_2 thin film on glass. For this method, post-annealing process is vital to the formation and quality of VO_2 thin film. Annealing temperature, time, and oxygen pressure for preparing of large scale VO_2 films on glass were studied systematically in this work. The influence of Ⅴ film thickness is studied as well. The results reveal that the best annealing parameters are significantly influenced by the thickness of Ⅴ film. The mechanism of annealing oxidation process is discussed further. The oxidation process is dominated by the reaction-control rather than the diffusion-control. A 200 mm × 200 mm large area VO_2 film on glass substrate was successfully prepared through metal vanadium oxidation method for demonstration. It is a promising way for large scale fabrication of high performance smart energy-saving window.
机译：钒氧化法是在玻璃上工业生产VO_2薄膜的一种有前途的方法。对于此方法，后退火工艺对于VO_2薄膜的形成和质量至关重要。这项工作系统地研究了在玻璃上制备大规模VO_2薄膜的退火温度，时间和氧气压力。同时研究了Ⅴ膜厚度的影响。结果表明，最佳退火参数受Ⅴ膜厚度的影响。进一步讨论了退火氧化过程的机理。氧化过程由反应控制而不是扩散控制主导。通过金属钒氧化法成功地在玻璃基板上制备了200 mm×200 mm的大面积VO_2薄膜进行演示。这是大规模制造高性能智能节能窗的有前途的方法。

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  • 来源
    《Optical and quantum electronics》 |2016年第10期|453.1-453.10|共10页
  • 作者

    Xingxing Liu; Ruonan Ji; Yi Zhang; Huafen Li; Shao-Wei Wang;

  • 作者单位

    National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China ,Shanghai Engineering Research Center of Energy-Saving Coatings, Shanghai 200083, China ,University of Chinese Academy of Sciences, Beijing 100049, China;

    National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China ,Shanghai Engineering Research Center of Energy-Saving Coatings, Shanghai 200083, China ,University of Chinese Academy of Sciences, Beijing 100049, China;

    National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China ,Shanghai Engineering Research Center of Energy-Saving Coatings, Shanghai 200083, China ,Department of Physics, Mathematics and Science College, Shanghai Normal University, Shanghai 200234, China;

    National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China ,Shanghai Engineering Research Center of Energy-Saving Coatings, Shanghai 200083, China;

    National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China ,Shanghai Engineering Research Center of Energy-Saving Coatings, Shanghai 200083, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    VO_2 film; Annealing; Magnetron sputtering; Transmission change;

    机译：VO_2胶卷;退火;磁控溅射;变速箱变化;

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