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Investigating the use of AlN substrate in plasmon-based optical sensor: performance evaluation

机译：研究AlN衬底在基于等离激元的光学传感器中的使用：性能评估

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摘要

Aluminum nitride (AlN) possesses noble physical and optical properties at large ranges of wavelength and temperature. A new design of AlN substrate based surface plasmon resonance (SPR) sensor for the determination of temperature is proposed. Recent experimental results describing variation of refractive index of AlN with wavelength and temperature are considered for theoretical calculations. The angular interrogation method along with thermo-optic effect in metal and dielectric media is considered. The sensor's performance is closely analyzed in terms of well-defined performance indicators in order to achieve reliable and accurate sensing performance. The influence of operating wavelength on the performance of temperature sensor is investigated. The proposed AlN-based temperature sensor has the capability to provide high performance. The stability of AlN at higher temperature is another added advantage that contributes to precise measurements even at higher temperatures with AIN-based SPR sensor. High refractive index of AlN in combination with SPR can make it a potential candidate for infrared sensing.
机译：氮化铝（AlN）在较大的波长和温度范围内具有高贵的物理和光学特性。提出了一种新的基于AlN衬底的表面等离子体共振（SPR）传感器设计，用于确定温度。理论计算考虑了描述AlN折射率随波长和温度变化的最新实验结果。考虑了角度询问方法以及金属和介电介质中的热光效应。传感器的性能会根据定义明确的性能指标进行仔细分析，以实现可靠而准确的传感性能。研究了工作波长对温度传感器性能的影响。提出的基于AlN的温度传感器具有提供高性能的能力。 AlN在较高温度下的稳定性是另一个附加优点，即使使用基于AIN的SPR传感器，即使在较高温度下，AlN也有助于精确测量。 AlN的高折射率与SPR结合可以使其成为红外传感的潜在候选者。

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