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首页> 外文期刊>Optical and quantum electronics >Fabrication and characterization of microlenses made of tellurite and heavy metal oxide glass developed with hot embossing technology
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Fabrication and characterization of microlenses made of tellurite and heavy metal oxide glass developed with hot embossing technology

机译：用热压花技术开发的由亚碲酸盐和重金属氧化物玻璃制成的微透镜的制备和表征

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摘要

In this paper we describe the work on application of hot embossing process to fabrication of micro-optical elements transmitting in the visible, near infrared and mid-infrared part of spectrum, using multi-component soft glasses as starting materials. Description of used hot embossing (HE) process is provided, followed by discussion of rheologieal and viscosity properties of several glass types considered for demonstrator fabrication experiment. Demonstrator microlenses were fabricated from lead-bismuth-gallium oxide (PBG08) and tellurite glasses (TWPN/I/6), with transmission windows extending from the visible up to the mid-infrared (up to around 6.5 μm). Fabricated elements, which included diffractive and refractive lenses and lens arrays, were examined in context of homogeneity (quality of pattern replication) and obtained optical properties (M~2, focal length, resolution). A demonstrator microscope objective was constructed using refractive plano-concave, plano-convex and biconvex lenses fabricated with the HE setup and its optical characteristics were provided.
机译：在本文中，我们描述了使用多组分软玻璃作为起始材料，将热压印工艺应用于制造在可见，近红外和中红外光谱中透射的微光学元件的制造工作。提供了使用的热压花（HE）工艺的描述，然后讨论了用于演示器制造实验的几种玻璃的流变学和粘度特性。演示器微透镜由铅-铋-镓氧化物（PBG08）和亚碲酸盐玻璃（TWPN / I / 6）制成，其透射窗口从可见光一直延伸到中红外光（最大6.5μm）。在同质性（图案复制的质量）的背景下检查了包括衍射透镜和折射透镜以及透镜阵列在内的制造元件，并获得了光学性能（M〜2，焦距，分辨率）。使用由HE装置制造的平凹，平凸和双凸透镜构造演示显微镜物镜，并提供其光学特性。

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  • 来源
    《Optical and quantum electronics》 |2014年第4期|541-552|共12页
  • 作者

    R. Kasztelanic; I. Kujawa; R. Stepien; J. Cimek; K. Harasny; M. Klimczak; A. J. Waddie; M. R. Taghizadeh; R. Buczynski;

  • 作者单位

    Faculty of Physics, University of Warsaw, ul. Pasteura 7, 02-093 Warsaw, Poland;

    Institute of Electronic Materials Technology, ul. Wolczynska 133, 01-919 Warsaw, Poland;

    Institute of Electronic Materials Technology, ul. Wolczynska 133, 01-919 Warsaw, Poland;

    Institute of Electronic Materials Technology, ul. Wolczynska 133, 01-919 Warsaw, Poland;

    Institute of Electronic Materials Technology, ul. Wolczynska 133, 01-919 Warsaw, Poland;

    Institute of Electronic Materials Technology, ul. Wolczynska 133, 01-919 Warsaw, Poland;

    Institute of Photonics and Quantum Sciences, School of Engineering and Physical Sciences, Heriot-Watt University, Edinburgh EH14 4AS, Scotland, UK;

    Institute of Photonics and Quantum Sciences, School of Engineering and Physical Sciences, Heriot-Watt University, Edinburgh EH14 4AS, Scotland, UK;

    Faculty of Physics, University of Warsaw, ul. Pasteura 7, 02-093 Warsaw, Poland,Institute of Electronic Materials Technology, ul. Wolczynska 133, 01-919 Warsaw, Poland;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Hot embossing; Mid-infrared microlens; Micro-optics fabrication;

    机译：热压纹;中红外微透镜;微光学制造;

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