The optical and electrical properties of F doped ZnO thin film by different post-annealing temperatures

著录项

• 来源
  《Optical and quantum electronics》 |2018年第4期|169.1-169.8|共8页
• 作者

  Chih Yun Lin; Tao-Hsing Chen; Sheng-Lung Tu; Yun-Hwei Shen; Jia-Ting Huang;

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• 作者单位

  Department of Resources Engineering, National Cheng Kung University;

  Department of Mechanical Engineering, National Kaohsiung University of Science and Technology;

  Department of Electrical Engineering, Cheng Shiu University;

  Department of Resources Engineering, National Cheng Kung University;

  Department of Mechanical Engineering, National Kaohsiung University of Science and Technology;

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• 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  TCO; FZO; RF sputtering; Annealing;

  机译：TCO;FZO;RF溅射;退火;