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首页> 外文期刊>Optical and quantum electronics >Efficient SnO_2/CuO/porous silicon nanocomposites structure for NH_3 gas sensing by incorporating CuO nanoparticles
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Efficient SnO_2/CuO/porous silicon nanocomposites structure for NH_3 gas sensing by incorporating CuO nanoparticles

机译：通过掺入CuO纳米颗粒用于NH_3气敏的高效SnO_2 / CuO /多孔硅纳米复合结构

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摘要

In this paper, a porous silicon (Psi) surface modification process, including the incorporating of pure and CuO mixed SnO2 within a Psi layer, was investigated. A Psi layer with a pore-like structure prepared via laser-assisted etching process with a laser illumination intensity of (40) mW/cm(2) was employed as a substrate for materialization SnO2/CuO/Psi nanocomposites for gas sensing application. Pure SnO2 and SnO2:CuO nanoparticles were synthesized via a chemical spray pyrolysis process on the Psi surface at 350 degrees C. The materialization of SnO2:CuO/Psi nanocomposites were recognized through Field-Emission Scanning Electron Microscopy, X-ray Diffraction, Atomic Force Microscopy, and Energy-dispersive X-ray Analysis. The results displayed that the morphological properties of SnO2:CuO nanoparticles were definitely controlled by varying the CuO contents. Different shapes (nearly cubic shape and spherical shape) with various sizes of SnO2 and SnO2:CuO within the Psi surface were achieved by increasing the CuO content. SnO2:CuO/Psi nano-composites, plans, grain size, average surface roughness, homogeneity and specific surface area of SnO2:CuO nanoparticles were considerably influenced by CuO content. The lower grain size and higher average surface roughness and specific surface area were attained when the percentage of CuO was about 30% within the structure of 70% SnO2:30% CuO, and the performance of the NH3 gas sensor revealed a short response time with a high sensitivity of (88%).
机译：本文研究了一种多孔硅（Psi）表面改性工艺，包括在Psi层中掺入纯铜和CuO混合SnO2。通过激光辅助蚀刻工艺制备的具有孔状结构的Psi层，其激光照射强度为（40）mW / cm（2），被用作用于气敏应用的SnO2 / CuO / Psi纳米复合材料的物化衬底。通过化学喷雾热解过程在350摄氏度的Psi表面上合成了纯SnO2和SnO2：CuO纳米颗粒。通过场发射扫描电子显微镜，X射线衍射，原子力识别了SnO2：CuO / Psi纳米复合材料的物化。显微镜和能量色散X射线分析。结果表明，SnO2：CuO纳米颗粒的形貌特性可以通过改变CuO的含量来控制。通过增加CuO的含量，可以在Psi表面形成具有各种尺寸的SnO2和SnO2：CuO的不同形状（近立方形状和球形）。 SnO2：CuO / Psi纳米复合材料，平面度，晶粒尺寸，平均表面粗糙度，均匀性和比表面积均受CuO含量的影响。当在70％SnO2：30％CuO的结构中CuO的百分比约为30％时，可以获得较低的晶粒尺寸和较高的平均表面粗糙度和比表面积，并且NH3气体传感器的性能显示出响应时间短。灵敏度高达（88％）。

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