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Real-time measurement of microcantilever displacement based on Linnik microscopic speckle interferometer

机译：基于林尼克显微散斑干涉仪的微悬臂梁位移实时测量

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摘要

Nowadays, the application of MEMS is more and more important. With the development of micro-structure technology, higher requirements are also placed on measurement methods. However, the current measurement methods cannot meet these requirements due to their own limitations. We developed a method based on the temporal microscopic speckle interferometry, which has advantages of real-time, full field, high-precision, and nondestructive. The interferometer based on Linnik microscopic structure is built up. The corresponding displacement measuring experiments have been performed, and the measurement errors are <0.05 μm. The experimental results demonstrate the validity of our homemade device.
机译：如今，MEMS的应用越来越重要。随着微结构技术的发展，对测量方法也提出了更高的要求。但是，当前的测量方法由于其自身的局限性而无法满足这些要求。我们开发了一种基于时间显微斑点干涉法的方法，该方法具有实时，全视场，高精度和无损的优点。建立了基于Linnik显微结构的干涉仪。进行了相应的位移测量实验，测量误差<0.05μm。实验结果证明了自制设备的有效性。

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  • 来源
    《Optical engineering》 |2018年第12期|124101.1-124101.6|共6页
  • 作者

    Chenjia Gao; Zhan Gao; Xu Wang; Zihui Liu; Chuqian Zhong; Yuan Zhang; Yuchen Liu;

  • 作者单位

    Beijing Jiaotong University, Key Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing, China;

    Beijing Jiaotong University, Key Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing, China;

    Beijing Jiaotong University, Key Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing, China;

    Beijing Jiaotong University, Key Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing, China;

    Beijing Jiaotong University, Key Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing, China;

    Beijing Jiaotong University, Key Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing, China;

    Beijing Jiaotong University, Key Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    microelectromechanical systems; Linnik microscope; speckle interferometer;

    机译：微机电系统;林尼克显微镜散斑干涉仪;

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